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通过界面和体相处理增强基于 NbO 的温度调制弛豫振荡器。

Enhancement of temperature-modulated NbO-based relaxation oscillator via interfacial and bulk treatments.

机构信息

School of Physical and Mathematical Sciences, Nanyang Technological University, 21 Nanyang Link, 637371, Singapore.

GLOBALFOUNDRIES Singapore Pte. Ltd, 60 Woodlands Industrial Park D St 2, 738406, Singapore.

出版信息

Nanotechnology. 2023 Feb 16;34(18). doi: 10.1088/1361-6528/acb778.

DOI:10.1088/1361-6528/acb778
PMID:36720156
Abstract

This work demonstrates oscillation frequency modulation in a NbO-based relaxation oscillator device, in which the oscillation frequency increases with operating temperature and source voltage, and decreases with load resistance. An annealing-induced oxygen diffusion at 373 K was carried out to optimize the stoichiometry of the bulk NbOto achieve consistent oscillation frequency shift with device temperature. The device exhibits stable self-sustained oscillation in which the frequency can be modulated between 2 and 33 MHz, and a wider operating voltage range can be obtained. An additional surface treatment step was employed during fabrication to reduce the surface roughness of the bottom electrode and to remove surface contaminants that affect the interfacial properties of the device. The device frequency tunability coupled with high oscillating frequency and high endurance capability of more than 1.5 × 10cycles indicates that the Pt/NbO/Pt device is particularly suitable for applications in an oscillatory neural network.

摘要

这项工作展示了基于 NbO 的弛豫振荡器器件中的振荡频率调制,其中振荡频率随工作温度和源电压升高而增加,随负载电阻降低而降低。在 373 K 下进行退火诱导的氧扩散,以优化体 NbO 的化学计量比,从而实现器件温度下一致的振荡频率偏移。该器件表现出稳定的自维持振荡,其频率可在 2 至 33 MHz 之间调制,并可获得更宽的工作电压范围。在制造过程中采用了额外的表面处理步骤,以降低底部电极的表面粗糙度并去除影响器件界面特性的表面污染物。该器件的频率可调性与高振荡频率和超过 1.5×10 次循环的高耐久性相结合,表明 Pt/NbO/Pt 器件特别适用于振荡神经网络中的应用。

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