Tian Naxi, Jiang Hui, Xie Jianan, Yan Shuai, Liang Dongxu, Jiang Zhisen
Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Chinese Academy of Sciences, 239 Zhangheng Road, Pudong District, Shanghai 201204, People's Republic of China.
J Synchrotron Radiat. 2024 Jan 1;31(Pt 1):10-16. doi: 10.1107/S1600577523009566.
X-ray mirrors for synchrotron radiation are often bent into a curved figure and work under grazing-incidence conditions due to the strong penetrating nature of X-rays to most materials. Mirrors of different cross sections have been recommended to reduce the mirror's slope inaccuracy and clamping difficulty in order to overcome mechanical tolerances. With the development of hard X-ray focusing, it is difficult to meet the needs of focusing mirrors with small slope error with the existing mirror processing technology. Deformable mirrors are adaptive optics that can produce a flexible surface figure. A method of using a deformable mirror as a phase compensator is described to enhance the focusing performance of an X-ray mirror. This paper presents an active piezoelectric plane X-ray focusing mirror with a linearly changing thickness that has the ability of phase compensation while focusing X-rays. Benefiting from its special structural design, the mirror can realize flexible focusing at different focusing geometries using a single input driving voltage. A prototype was used to measure its performance under one-dimension and two-dimension conditions. The results prove that, even at a bending magnet beamline, the mirror can easily achieve a single-micrometre focusing without a complicated bending mechanism or high-precision surface processing. It is hoped that this kind of deformable mirror will have a wide and flexible application in the synchrotron radiation field.
用于同步辐射的X射线镜通常被弯曲成曲面形状，并在掠入射条件下工作，这是因为X射线对大多数材料具有很强的穿透性。为了克服机械公差，人们推荐使用不同横截面的镜子来降低镜子的斜率误差和夹紧难度。随着硬X射线聚焦技术的发展，现有的镜子加工技术难以满足对斜率误差小的聚焦镜的需求。可变形镜是一种能产生灵活表面形状的自适应光学元件。本文描述了一种将可变形镜用作相位补偿器以提高X射线镜聚焦性能的方法。本文提出了一种具有线性变化厚度的有源压电平面X射线聚焦镜，它在聚焦X射线时具有相位补偿能力。得益于其特殊的结构设计，该镜子使用单个输入驱动电压就能在不同聚焦几何条件下实现灵活聚焦。使用一个原型在一维和二维条件下测量了其性能。结果证明，即使在弯曲磁铁光束线处，该镜子无需复杂的弯曲机构或高精度表面加工就能轻松实现单微米聚焦。希望这种可变形镜能在同步辐射领域得到广泛而灵活的应用。
