Zhang Hui, Yi Yanji, Wang Yibin, Hou Huwang, Meng Ting, Zhang Peng, Zhao Yang
Chinese Academy of Sciences Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230022, China.
Department of Precision Machinery & Precision Instrumentation, University of Science and Technology of China, Hefei 230022, China.
Nanomaterials (Basel). 2023 Jan 18;13(3):391. doi: 10.3390/nano13030391.
A micropolarizer array (MPA) that can be integrated into a scientific camera is proposed as a real-time polarimeter that is capable of extracting the polarization parameters. The MPA is based on highly aligned carbon nanotube (CNT) films inspired by their typical anisotropy and selectivity for light propagation over a wide spectral range. The MPA contains a dual-tier CNT pixel plane with 0° and 45° orientations. The thickness of the dual-tier structure of the CNT-based MPA is limited to less than 2 μm with a pixel size of 7.45 μm × 7.45 μm. The degree of polarization of the CNT-MPA reached 93% at a 632 nm wavelength. The specific designs in structure and semiconductor fabrication procedures are described. Compared with customary MPAs, CNT-based MPA holds great potential in decreasing the cross-talk risk associated with lower film thickness and can be extended to a wide spectral range.
一种可集成到科学相机中的微偏振器阵列（MPA）被提议作为一种能够提取偏振参数的实时偏振计。该MPA基于高度对齐的碳纳米管（CNT）薄膜，这是受到它们在宽光谱范围内对光传播的典型各向异性和选择性的启发。MPA包含一个具有0°和45°取向的双层CNT像素平面。基于CNT的MPA双层结构的厚度限制在小于2μm，像素尺寸为7.45μm×7.45μm。在632nm波长下，CNT-MPA的偏振度达到了93%。文中描述了其在结构和半导体制造工艺方面的具体设计。与传统的MPA相比，基于CNT的MPA在降低与较低薄膜厚度相关的串扰风险方面具有巨大潜力，并且可以扩展到宽光谱范围。
