Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon, 34141, Republic of Korea.
Department of Nano Manufacturing Technology, Korea Institute of Machinery and Materials (KIMM), Daejeon, 34103, Republic of Korea.
Nat Commun. 2023 Feb 14;14(1):833. doi: 10.1038/s41467-023-36302-9.
The growing demand for complex three-dimensional (3D) micro-/nanostructures has inspired the development of the corresponding manufacturing techniques. Among these techniques, 3D fabrication based on mechanically guided assembly offers the advantages of broad material compatibility, high designability, and structural reversibility under strain but is not applicable for nanoscale device printing because of the bottleneck at nanofabrication and design technique. Herein, a configuration-designable nanoscale 3D fabrication is suggested through a robust nanotransfer methodology and design of substrate's mechanical characteristics. Covalent bonding-based two-dimensional nanotransfer allowing for nanostructure printing on elastomer substrates is used to address fabrication problems, while the feasibility of configuration design through the modulation of substrate's mechanical characteristics is examined using analytical calculations and numerical simulations, allowing printing of various 3D nanostructures. The printed nanostructures exhibit strain-independent electrical properties and are therefore used to fabricate stretchable H and NO sensors with high performances stable under external strains of 30%.
日益增长的对复杂三维（3D）微/纳结构的需求，激发了相应制造技术的发展。在这些技术中，基于机械引导组装的 3D 制造具有广泛的材料兼容性、高设计性和应变下的结构可还原性的优点，但由于纳米制造和设计技术的瓶颈，不适用于纳米级器件打印。在此，通过稳健的纳米转移方法和基底机械特性设计，提出了一种可配置的纳米级 3D 制造。基于共价键的二维纳米转移允许在弹性体基底上打印纳米结构，用于解决制造问题，而通过基底机械特性的调制进行的配置设计的可行性则通过分析计算和数值模拟进行了检验，允许打印各种 3D 纳米结构。所打印的纳米结构表现出与应变无关的电学性能，因此被用于制造具有 30%应变下的高性能和稳定性的可拉伸 H 和 NO 传感器。
