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通过微泡实现用于纳米光子学的等离子体纳米结构的晶圆级复制

Wafer-Scale Replication of Plasmonic Nanostructures via Microbubbles for Nanophotonics.

作者信息

Hwang Jehwan, Zhang Yue, Kim Bongjoong, Jeong Jinheon, Yi Jonghun, Kim Dong Rip, Kim Young L, Urbas Augustine, Ariyawansa Gamini, Xu Baoxing, Ku Zahyun, Lee Chi Hwan

机构信息

Weldon School of Biomedical Engineering, Purdue University, West Lafayette, IN, 47907, USA.

Optical Lens Materials Research Center, Korea Photonics Technology Institute (KOPTI), Gwangju, 61007, Republic of Korea.

出版信息

Adv Sci (Weinh). 2024 Oct;11(40):e2404870. doi: 10.1002/advs.202404870. Epub 2024 Sep 3.

DOI:10.1002/advs.202404870
PMID:39225406
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11516140/
Abstract

Quasi-3D plasmonic nanostructures are in high demand for their ability to manipulate and enhance light-matter interactions at subwavelength scales, making them promising building blocks for diverse nanophotonic devices. Despite their potential, the integration of these nanostructures with optical sensors and imaging systems on a large scale poses challenges. Here, a robust technique for the rapid, scalable, and seamless replication of quasi-3D plasmonic nanostructures is presented straight from their production wafers using a microbubble process. This approach not only simplifies the integration of quasi-3D plasmonic nanostructures into a wide range of standard and custom optical imaging devices and sensors but also significantly enhances their imaging and sensing performance beyond the limits of conventional methods. This study encompasses experimental, computational, and theoretical investigations, and it fully elucidates the operational mechanism. Additionally, it explores a versatile set of options for outfitting nanophotonic devices with custom-designed plasmonic nanostructures, thereby fulfilling specific operational criteria.

摘要

准三维等离子体纳米结构因其在亚波长尺度上操纵和增强光与物质相互作用的能力而备受关注,使其成为各种纳米光子器件的有前途的构建模块。尽管它们具有潜力,但将这些纳米结构大规模集成到光学传感器和成像系统中仍面临挑战。在此,提出了一种强大的技术,可使用微泡工艺直接从其生产晶圆快速、可扩展且无缝地复制准三维等离子体纳米结构。这种方法不仅简化了将准三维等离子体纳米结构集成到各种标准和定制光学成像设备及传感器中的过程,而且还显著提高了它们的成像和传感性能,超越了传统方法的极限。本研究涵盖了实验、计算和理论研究,并充分阐明了其运行机制。此外,它还探索了一系列通用选项,可为纳米光子器件配备定制设计的等离子体纳米结构,从而满足特定的操作标准。

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本文引用的文献

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Laser-driven noncontact bubble transfer printing via a hydrogel composite stamp.通过水凝胶复合印章实现激光驱动的非接触气泡转移打印。
Proc Natl Acad Sci U S A. 2024 Jan 30;121(5):e2318739121. doi: 10.1073/pnas.2318739121. Epub 2024 Jan 24.
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Illuminating Recent Progress in Nanotransfer Printing: Core Principles, Emerging Applications, and Future Perspectives.揭示纳米转移印刷的最新进展:核心原理、新兴应用及未来展望。
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具有微纳结构的超薄嵌段共聚物薄膜的直接印刷
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Ultralight plasmonic structural color paint.超轻等离子体结构色涂料。
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Nanoscale three-dimensional fabrication based on mechanically guided assembly.基于机械引导组装的纳米尺度三维制造。
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Gigahertz optoacoustic vibration in Sub-5 nm tip-supported nano-optomechanical metasurface.亚 5nm 悬空纳米光机械超构表面中的千兆赫兹光声振动
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