Zhang Yi-Fei, Cui Min, Wu Dong-Ping
State Key Laboratory of ASIC and System, Fudan University, Shanghai 200433, China.
School of Microelectronics, Fudan University, Shanghai 200433, China.
Micromachines (Basel). 2023 Jan 21;14(2):280. doi: 10.3390/mi14020280.
The design simulation and fabrication results of a bandpass filter based on micro-electro-mechanical system (MEMS) switches are presented in this paper. The MEMS filter element consists of a MEMS capacitance switch and two resonant rings that are fixed onto coplanar waveguide lines through anchor points. The micromachine characteristics of the filter could be optimized to change the center frequency from 8.5 to 12 GHz by improving the geometrical parameters; other electrical parameters of the filter, such as stopband rejection, insertion loss, and return loss at each center frequency, were simulated and calculated. In order to evaluate the MEMS filter design methodology, a filter working at 10.5 GHz fabricated with an aluminum top electrode was used, and it displayed a low insertion loss of 1.12 dB and a high stopband rejection of 28.3 dB. Compared with the simulation results, these proposed filter showed better electrical performance. Our results demonstrated that the filter with the integrated RF MEMS switch not only provides the benefit of reduced size compared with a traditional filter, but also improves stopband rejection, insertion loss, and return loss.
本文介绍了一种基于微机电系统（MEMS）开关的带通滤波器的设计仿真和制造结果。MEMS滤波器元件由一个MEMS电容开关和两个通过锚点固定在共面波导线上的谐振环组成。通过改进几何参数，可以优化滤波器的微机械特性，将中心频率从8.5 GHz改变到12 GHz；对滤波器的其他电气参数，如每个中心频率下的阻带抑制、插入损耗和回波损耗进行了仿真和计算。为了评估MEMS滤波器的设计方法，使用了一个采用铝顶电极制造的工作在10.5 GHz的滤波器，它显示出1.12 dB的低插入损耗和28.3 dB的高阻带抑制。与仿真结果相比，这些所提出的滤波器显示出更好的电气性能。我们的结果表明，集成了射频MEMS开关的滤波器不仅与传统滤波器相比具有减小尺寸的优点，而且还改善了阻带抑制、插入损耗和回波损耗。
