Li Qian, Ye Zi, Liu Mingyang, Liu Wei, Zhang Pan, Sun Xiao, Zhang Huimin, Li Zhenming, Gui Lin
CAS Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, Beijing, China.
School of Engineering Science, University of Chinese Academy of Sciences, Beijing, China.
Front Bioeng Biotechnol. 2023 Feb 16;11:1105154. doi: 10.3389/fbioe.2023.1105154. eCollection 2023.
This work proposes an "N2-1" sacrificial strategy to help to improve the accuracy of the bonding technique from the existing level. The target micropattern is copied N2 times, and (N2-1) of them are sacrificed to obtain the most accurate alignment. Meanwhile, a method for manufacturing auxiliary solid alignment lines on transparent materials is proposed to visualize auxiliary marks and facilitate the alignment. Though the principle and procedure of alignment are straightforward, the alignment accuracy substantially improved compared to the original method. With this technique, we have successfully fabricated a high-precision 3D electroosmotic micropump just using a conventional desktop aligner. Because of the high precision during the alignment, the flow velocity is up to 435.62 μm/s at a driven voltage of 40 V, which far exceeds the previous similar reports. Thus, we believe that it has great potential for high precision microfluidic device fabrications.
这项工作提出了一种“N2 - 1”牺牲策略，以帮助将键合技术的精度从现有水平提高。目标微图案被复制N2次，其中（N2 - 1）个被牺牲以获得最精确的对准。同时，提出了一种在透明材料上制造辅助固体对准线的方法，以可视化辅助标记并便于对准。尽管对准的原理和过程很简单，但与原始方法相比，对准精度有了显著提高。利用这种技术，我们仅使用传统的台式对准器就成功制造了一个高精度的3D电渗微泵。由于对准过程中的高精度，在40 V驱动电压下流速高达435.62μm/s，这远远超过了以前的类似报道。因此，我们认为它在高精度微流控器件制造方面具有巨大潜力。
