一种使用掩膜对准器将聚二甲基硅氧烷（PDMS）微通道与芯片上电极进行精确对准的可重复方法。
A reproducible method for m precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner.
作者信息
Cottet J, Vaillier C, Buret F, Frénéa-Robin M, Renaud P
机构信息
École Polytechnique Fédérale de Lausanne, STI IMT LMIS4, Station 17, CH-1015 Lausanne, Switzerland.
Univ Lyon, Ecole Centrale de Lyon, Université Claude Bernard Lyon 1, CNRS, AMPERE, F-69130, Ecully, France.
出版信息
Biomicrofluidics. 2017 Dec 20;11(6):064111. doi: 10.1063/1.5001145. eCollection 2017 Nov.
Abstract
This paper describes a reproducible method for m precision alignment of polydimethylsiloxane (PDMS) microchannels with coplanar electrodes using a conventional mask aligner for lab-on-a-chip applications. It is based on the use of a silicon mold in combination with a PMMA sarcophagus for precise control of the parallelism between the top and bottom surfaces of molded PDMS. The alignment of the fabricated PDMS slab with electrodes patterned on a glass chip is then performed using a conventional mask aligner with a custom-made steel chuck and magnets. This technique allows to bond and align chips with a resolution of less than 2 m.
摘要
本文介绍了一种可重复的方法，用于在芯片实验室应用中，使用传统的掩膜对准器将聚二甲基硅氧烷（PDMS）微通道与共面电极进行精确对准。该方法基于使用硅模具结合聚甲基丙烯酸甲酯（PMMA）棺盖，以精确控制模制PDMS上下表面之间的平行度。然后，使用带有定制钢卡盘和磁铁的传统掩膜对准器，将制造的PDMS平板与玻璃芯片上图案化的电极进行对准。该技术能够以小于2微米的分辨率对芯片进行键合和对准。
相似文献
1
A reproducible method for m precision alignment of PDMS microchannels with on-chip electrodes using a mask aligner.一种使用掩膜对准器将聚二甲基硅氧烷（PDMS）微通道与芯片上电极进行精确对准的可重复方法。
Biomicrofluidics. 2017 Dec 20;11(6):064111. doi: 10.1063/1.5001145. eCollection 2017 Nov.
2
Multilayer Soft Photolithography Fabrication of Microfluidic Devices Using a Custom-Built Wafer-Scale PDMS Slab Aligner and Cost-Efficient Equipment.使用定制的晶圆级聚二甲基硅氧烷（PDMS）平板对准器和经济高效的设备通过多层软光刻制造微流控器件。
Micromachines (Basel). 2022 Aug 20;13(8):1357. doi: 10.3390/mi13081357.
3
Desktop aligner for fabrication of multilayer microfluidic devices.用于制造多层微流控装置的桌面式对准仪。
Rev Sci Instrum. 2015 Jul;86(7):075008. doi: 10.1063/1.4927197.
4
CO-Laser-Micromachined, Polymer Microchannels with a Degassed PDMS slab for the Automatic Production of Monodispersed Water-in-Oil Droplets.采用共聚焦激光微加工技术制造的带有脱气聚二甲基硅氧烷（PDMS）平板的聚合物微通道，用于自动生产单分散油包水微滴。
Micromachines (Basel). 2022 Aug 25;13(9):1389. doi: 10.3390/mi13091389.
5
A portable and affordable aligner for the assembly of microfluidic devices.一种用于微流控设备组装的便携式且价格实惠的对准器。
HardwareX. 2022 Aug 27;12:e00348. doi: 10.1016/j.ohx.2022.e00348. eCollection 2022 Oct.
6
A New Silicon Mold Process for Polydimethylsiloxane Microchannels.一种用于聚二甲基硅氧烷微通道的新型硅模具工艺。
Micromachines (Basel). 2024 Jun 29;15(7):848. doi: 10.3390/mi15070848.
7
Novel Reproducible Manufacturing and Reversible Sealing Method for Microfluidic Devices.微流控设备的新型可重复制造及可逆密封方法
Micromachines (Basel). 2022 Apr 19;13(5):650. doi: 10.3390/mi13050650.
8
Erratum: Scalable Fabrication of Stretchable, Dual Channel, Microfluidic Organ Chips.勘误：可扩展制造可拉伸双通道微流控器官芯片
J Vis Exp. 2019 May 8(147). doi: 10.3791/6296.
9
Low-cost and versatile integration of microwire electrodes and optical waveguides into silicone elastomeric devices using modified xurographic methods.使用改进的刻图法将微线电极和光波导低成本且多功能地集成到硅橡胶弹性体装置中。
Microsyst Nanoeng. 2017 Oct 9;3:17040. doi: 10.1038/micronano.2017.40. eCollection 2017.
10
A hinge-based aligner for fast, large-scale assembly of microfluidic chips.基于铰链的微流控芯片快速大规模组装对准器。
Biomed Microdevices. 2019 Jul 4;21(3):69. doi: 10.1007/s10544-019-0404-y.
引用本文的文献
1
Magnetic Microtweezers for High-Throughput Bioseparation in Sub-Nanoliter Droplets.用于亚纳升级别液滴中高通量生物分离的磁性微镊
Methods Mol Biol. 2024;2804:163-176. doi: 10.1007/978-1-0716-3850-7_10.
2
Precision enhanced alignment bonding technique with sacrificial strategy.采用牺牲策略的精度增强对准键合技术。
Front Bioeng Biotechnol. 2023 Feb 16;11:1105154. doi: 10.3389/fbioe.2023.1105154. eCollection 2023.
3
A portable and affordable aligner for the assembly of microfluidic devices.一种用于微流控设备组装的便携式且价格实惠的对准器。
HardwareX. 2022 Aug 27;12:e00348. doi: 10.1016/j.ohx.2022.e00348. eCollection 2022 Oct.
4
Dielectrophoretic Traps for Efficient Bead and Cell Trapping and Formation of Aggregates of Controlled Size and Composition.用于高效捕获珠子和细胞以及形成尺寸和组成可控聚集体的介电泳陷阱。
Front Bioeng Biotechnol. 2022 Jul 14;10:910578. doi: 10.3389/fbioe.2022.910578. eCollection 2022.
5
Planar hydrodynamic traps and buried channels for bead and cell trapping and releasing.平面流体力陷阱和埋藏通道，用于珠粒和细胞的捕获和释放。
Lab Chip. 2021 Sep 28;21(19):3686-3694. doi: 10.1039/d1lc00463h.
6
Dielectrophoretic Separation of Particles Using Microfluidic Chip with Composite Three-Dimensional Electrode.使用具有复合三维电极的微流控芯片进行粒子的介电泳分离
Micromachines (Basel). 2020 Jul 20;11(7):700. doi: 10.3390/mi11070700.
7
Self-aligned microfluidic contactless dielectrophoresis device fabricated by single-layer imprinting on cyclic olefin copolymer.采用单层压印在环烯烃共聚物上制造自对准微流控无接触电渗流装置。
Anal Bioanal Chem. 2020 Jun;412(16):3881-3889. doi: 10.1007/s00216-020-02667-9. Epub 2020 May 5.
本文引用的文献
1
A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device.一种用于聚二甲基硅氧烷（PDMS）和SU-8的通用键合方法及其在多功能微流控装置中的应用。
Micromachines (Basel). 2016 Dec 14;7(12):230. doi: 10.3390/mi7120230.
2
Control and automation of multilayered integrated microfluidic device fabrication.多层集成微流控设备制造的控制与自动化
Lab Chip. 2017 Jan 31;17(3):557-566. doi: 10.1039/c6lc01534d.
3
Desktop aligner for fabrication of multilayer microfluidic devices.用于制造多层微流控装置的桌面式对准仪。
Rev Sci Instrum. 2015 Jul;86(7):075008. doi: 10.1063/1.4927197.
4
An impedance-based flow microcytometer for single cell morphology discrimination.基于阻抗的流式微细胞仪用于单细胞形态鉴别。
Lab Chip. 2014 Jul 21;14(14):2548-55. doi: 10.1039/c4lc00221k.
5
From bipolar to quadrupolar electrode structures: an application of bond-detach lithography for dielectrophoretic particle assembly.从双极电极结构到四极电极结构：键合-分离光刻技术在介电泳粒子组装中的应用
Langmuir. 2014 May 20;30(19):5686-93. doi: 10.1021/la5005193. Epub 2014 May 5.
6
Microfabrication of human organs-on-chips.人源器官芯片的微加工。
Nat Protoc. 2013 Nov;8(11):2135-57. doi: 10.1038/nprot.2013.137. Epub 2013 Oct 10.
7
Sealing SU-8 microfluidic channels using PDMS.采用 PDMS 对 SU-8 微流控通道进行密封。
Biomicrofluidics. 2011 Dec;5(4):46503-465038. doi: 10.1063/1.3659016. Epub 2011 Nov 9.
8
Low cost fabrication and assembly process for re-usable 3D polydimethylsiloxane (PDMS) microfluidic networks.低成本制造和组装工艺，用于可重复使用的 3D 聚二甲基硅氧烷（PDMS）微流控网络。
Biomicrofluidics. 2011 Sep;5(3):36502-365026. doi: 10.1063/1.3641859. Epub 2011 Sep 26.
9
Three-dimensional fit-to-flow microfluidic assembly.三维适配流微流控组装。
Biomicrofluidics. 2011 Dec;5(4):46505-465059. doi: 10.1063/1.3670368. Epub 2011 Dec 14.
10
Reconstituting organ-level lung functions on a chip.在芯片上重建器官级肺功能。
Science. 2010 Jun 25;328(5986):1662-8. doi: 10.1126/science.1188302.
Zotero 插件