Bradley Department of Electrical and Computer Engineering, Virginia Tech, Blacksburg, VA, 24061, USA.
Sci Rep. 2023 Mar 13;13(1):4125. doi: 10.1038/s41598-023-30207-9.
The paper reports on a novel process flow to manufacture conductive organic electrodes from highly conductive doped PEDOT:PSS polymer films that can be patterned and display a good adhesion to oxidized Si wafers as well as to flexible substrates, such as Mylar. Among other results, it is shown that multiple depositions of PEDOT:PSS increase the electrical conductivity by more than two orders of magnitude without increasing the film thickness of PEDOT:PSS significantly. An exponential dependence between sheet resistance and the number of PEDOT:PSS coatings has been found. The electrical conductivity of PEDOT:PSS can be increased by another two orders of magnitude doping with Cu nanoparticles when coated on the surface of a soft-baked PEDOT:PSS film. It is found, however, that both kinds of conductivity enhancement are not additive. Adhesion of PEDOT:PSS to oxidized Si wafers and BoPET (Mylar) has been ensured by applying an oxygen plasma cleaning step before spin coating. The manufactured high-conductivity PEDOT:PSS film can be patterned using a sacrificial metal layer with subsequent etching of PEDOT:PSS in oxygen plasma, followed by the removal of the patterned segments of the sacrificial metal layer in an aqueous acid solution.
本文报道了一种新颖的工艺流程，用于制造由高导电性掺杂 PEDOT:PSS 聚合物薄膜制成的导电有机电极，这些薄膜可以进行图案化处理，并与氧化硅晶片以及柔性基底（如 Mylar）具有良好的附着力。除其他结果外，研究表明，多次沉积 PEDOT:PSS 可以将电导率提高两个数量级以上，而不会显著增加 PEDOT:PSS 的薄膜厚度。发现方阻与 PEDOT:PSS 涂层数量之间存在指数关系。当将 Cu 纳米粒子涂覆在软烤的 PEDOT:PSS 薄膜表面上时，PEDOT:PSS 的电导率可以再提高两个数量级。然而，发现这两种电导率增强不是加性的。通过在旋涂前施加氧气等离子体清洁步骤，可以确保 PEDOT:PSS 对氧化硅晶片和 BoPET（Mylar）的附着力。所制造的高导电性 PEDOT:PSS 薄膜可以使用牺牲金属层进行图案化，然后在氧气等离子体中对 PEDOT:PSS 进行蚀刻，随后在酸性水溶液中去除牺牲金属层的图案化部分。
