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通过液态金属瞬间氧化印刷的异质结晶体管。

Heterojunction Transistors Printed via Instantaneous Oxidation of Liquid Metals.

作者信息

Hamlin Andrew B, Agnew Simon A, Bonner Justin C, Hsu Julia W P, Scheideler William J

机构信息

Thayer School of Engineering, Dartmouth College, 15 Thayer Drive, Hanover, New Hampshire 03755, United States.

Department of Materials Science and Engineering, University of Texas at Dallas, 800 West Campbell Road, Richardson, Texas 75080, United States.

出版信息

Nano Lett. 2023 Apr 12;23(7):2544-2550. doi: 10.1021/acs.nanolett.2c04555. Epub 2023 Mar 15.

Abstract

Semiconducting transparent metal oxides are critical high mobility materials for flexible optoelectronic devices such as displays. We introduce the continuous liquid metal printing (CLMP) technique to enable rapid roll-to-roll compatible deposition of semiconducting two-dimensional (2D) metal oxide heterostructures. We leverage CLMP to deposit 10 cm-scale nanosheets of InO and GaO in seconds at a low process temperature ( < 200 °C) in air, fabricating heterojunction thin film transistors with 100× greater /, 4× steeper subthreshold slope, and a 50% increase in mobility over pure InO channels. Detailed nanoscale characterization of the heterointerface by X-ray photoelectron spectroscopy, UV-vis, and Kelvin probe elucidates the origins of enhanced electronic transport in these 2D heterojunctions. This combination of CLMP with the electrostatic control induced by the heterostructure architecture leads to high performance (μ up to 22.6 cm/(V s)) while reducing the process time for metal oxide transistors by greater than 100× compared with sol-gels and vacuum deposition methods.

摘要

半导体透明金属氧化物是用于诸如显示器等柔性光电器件的关键高迁移率材料。我们引入连续液态金属印刷(CLMP)技术,以实现半导体二维(2D)金属氧化物异质结构的快速卷对卷兼容沉积。我们利用CLMP在空气中低工艺温度(<200°C)下在几秒钟内沉积10厘米规模的InO和GaO纳米片,制造出具有比纯InO沟道大100倍的/、陡4倍的亚阈值斜率以及迁移率提高50%的异质结薄膜晶体管。通过X射线光电子能谱、紫外可见光谱和开尔文探针进行的详细纳米级异质界面表征阐明了这些二维异质结中增强电子传输的起源。CLMP与异质结构架构诱导的静电控制相结合,实现了高性能(μ高达22.6 cm/(V s)),同时与溶胶 - 凝胶法和真空沉积法相比,将金属氧化物晶体管的工艺时间减少了100倍以上。

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