Lu Shiheng, Cardenas Jorge A, Worsley Robyn, Williams Nicholas X, Andrews Joseph B, Casiraghi Cinzia, Franklin Aaron D
Department of Electrical and Computer Engineering , Duke University , Durham , North Carolina 27708 , United States.
School of Chemistry , University of Manchester , Manchester M13 9PL , United Kingdom.
ACS Nano. 2019 Oct 22;13(10):11263-11272. doi: 10.1021/acsnano.9b04337. Epub 2019 Oct 3.
Semiconducting carbon nanotubes (CNTs) printed into thin films offer high electrical performance, significant mechanical stability, and compatibility with low-temperature processing. Yet, the implementation of low-temperature printed devices, such as CNT thin-film transistors (CNT-TFTs), has been hindered by relatively high process temperature requirements imposed by other device layers-dielectrics and contacts. In this work, we overcome temperature constraints and demonstrate 1D-2D thin-film transistors (1D-2D TFTs) in a low-temperature (maximum exposure ≤80 °C) full print-in-place process (, no substrate removal from printer throughout the entire process) using an aerosol jet printer. Semiconducting 1D CNT channels are used with a 2D hexagonal boron nitride (h-BN) gate dielectric and traces of silver nanowires as the conductive electrodes, all deposited using the same printer. The aerosol jet-printed 2D h-BN films were realized proper ink formulation, such as utilizing the binder hydroxypropyl methylcellulose, which suppresses redispersion between adjacent printed layers. In addition to an ON/OFF current ratio up to 3.5 × 10, channel mobility up to 10.7 cm·V·s, and low gate hysteresis, 1D-2D TFTs exhibit extraordinary mechanical stability under bending due to the nanoscale network structure of each layer, with minimal changes in performance after 1000 bending test cycles at 2.1% strain. It is also confirmed that none of the device layers require high-temperature treatment to realize optimal performance. These findings provide an attractive approach toward a cost-effective, direct-write realization of electronics.
印刷成薄膜的半导体碳纳米管(CNT)具有高电气性能、显著的机械稳定性以及与低温工艺的兼容性。然而,低温印刷器件(如CNT薄膜晶体管(CNT-TFT))的应用受到其他器件层(电介质和触点)相对较高的工艺温度要求的阻碍。在这项工作中,我们克服了温度限制,并使用气溶胶喷射打印机在低温(最大曝光温度≤80°C)全原位印刷工艺(即在整个过程中无需从打印机上移除基板)中展示了一维-二维薄膜晶体管(1D-2D TFT)。半导体一维碳纳米管通道与二维六方氮化硼(h-BN)栅极电介质以及微量银纳米线用作导电电极,所有这些都使用同一台打印机进行沉积。通过适当的油墨配方,如使用粘合剂羟丙基甲基纤维素,实现了气溶胶喷射印刷的二维h-BN薄膜,该粘合剂可抑制相邻印刷层之间的再分散。除了高达3.5×10的开/关电流比、高达10.7 cm²·V⁻¹·s⁻¹的沟道迁移率和低栅极滞后现象外,由于各层的纳米级网络结构,1D-2D TFT在弯曲时表现出非凡的机械稳定性,在2.1%应变下进行1000次弯曲测试循环后性能变化最小。还证实,器件层均无需高温处理即可实现最佳性能。这些发现为经济高效、直写式电子器件的实现提供了一种有吸引力的方法。