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基于溶胶-凝胶法对蓝光氮化铟镓微发光二极管光电性能的侧壁钝化研究

Investigations of Sidewall Passivation Using the Sol-Gel Method on the Optoelectronic Performance for Blue InGaN Micro-LEDs.

作者信息

Huang Wenjun, Miao Xiangyu, Liu Zhaojun

机构信息

Department of Electronic and Electrical Engineering, Southern University of Science and Technology, Shenzhen 518055, China.

出版信息

Micromachines (Basel). 2023 Feb 27;14(3):566. doi: 10.3390/mi14030566.

Abstract

The optoelectronic effects of sidewall passivation on micro-light-emitting diodes (Micro-LEDs) were investigated using sol-gel chemical synthesis. Blue InGaN/GaN multi-quantum well (MQW) Micro-LEDs, ranging in size from 20 × 20 μm to 100 × 100 μm and with high EQE, were fabricated and distinguished by the passivation method used, including no passivation, sol-gel SiO, and plasma-enhanced chemical vapor deposition (PECVD) SiO. Impressively, the sol-gel method is advantageous in improving the optoelectronic performance of Micro-LEDs. The fabricated 20 × 20 μm Micro-LEDs showed an EQE of 27.7% with sol-gel passivation, which was a 14% improvement compared to devices without sidewall passivation. Sol-gel sidewall passivation allows Micro-LEDs to effectively achieve sharper edge emission, superior surface luminous uniformity, and intensity, providing the possibility for the fabrication of low-cost and high-efficiency Micro-LEDs.

摘要

采用溶胶 - 凝胶化学合成法研究了侧壁钝化对微发光二极管(Micro-LED)的光电效应。制备了尺寸范围为20×20μm至100×100μm且具有高外量子效率(EQE)的蓝色InGaN/GaN多量子阱(MQW)Micro-LED,并根据所使用的钝化方法进行区分,包括无钝化、溶胶 - 凝胶SiO以及等离子体增强化学气相沉积(PECVD)SiO。令人印象深刻的是,溶胶 - 凝胶法在改善Micro-LED的光电性能方面具有优势。制备的20×20μm Micro-LED在采用溶胶 - 凝胶钝化时显示出27.7%的外量子效率,与无侧壁钝化的器件相比提高了14%。溶胶 - 凝胶侧壁钝化使Micro-LED能够有效地实现更锐利的边缘发射、卓越的表面发光均匀性和强度,为低成本、高效率Micro-LED的制造提供了可能性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/09d6/10056319/4ae2fc7d7c14/micromachines-14-00566-g0A1.jpg

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