Zhang Junna, Lei Cheng, Liang Ting, Liu Ruifang, Zhao Zhujie, Qi Lei, Ghaffar Abdul, Xiong Jijun
State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.
State Key Laboratory of Bioelectronics, Southeast University, Nanjing 210096, China.
Micromachines (Basel). 2021 Dec 9;12(12):1531. doi: 10.3390/mi12121531.
In this paper, to address the problems of large blood draws, long testing times, and the inability to achieve dynamic detection of invasive testing for diabetes, stemming from the principle that type 1 diabetic patients exhale significantly higher levels of acetone than normal people, a FAIMS-MEMS gas sensor was designed to detect acetone, which utilizes the characteristics of high sensitivity, fast response, and non-invasive operation. It is prepared by MEMS processes, such as photolithography, etching, and sputtering, its specific dimensions are 4000 μm in length, 3000 μm in width and 800 μm in height and the related test system was built to detect acetone gas. The test results show that when acetone below 0.8 ppm is introduced, the voltage value detected by the sensor basically does not change, while when acetone gas exceeds 1.8 ppm, the voltage value detected by the sensor increases significantly. The detection accuracy of the sensor prepared by this method is about 0.02 ppm/mV, and the voltage change can reach 1 V with a response time of 3 s and a recovery time of 4 s when tested under 20 ppm acetone environment; this has good repeatability and stability, and has great prospects in the field of non-invasive detection of type 1 diabetes.
在本文中，针对1型糖尿病患者呼出的丙酮水平显著高于正常人这一原理所导致的糖尿病有创检测存在的采血量多、检测时间长以及无法实现动态检测等问题，设计了一种用于检测丙酮的流动调制离子迁移谱-微机电系统（FAIMS-MEMS）气体传感器，该传感器具有高灵敏度、快速响应和非侵入式操作的特点。它通过光刻、蚀刻和溅射等微机电系统工艺制备，其具体尺寸为长4000μm、宽3000μm、高800μm，并构建了相关测试系统来检测丙酮气体。测试结果表明，当引入低于0.8ppm的丙酮时，传感器检测到的电压值基本不变，而当丙酮气体超过1.8ppm时，传感器检测到的电压值显著增加。用该方法制备的传感器检测精度约为0.02ppm/mV，在20ppm丙酮环境下测试时，响应时间为3s，恢复时间为4s，电压变化可达1V；具有良好的重复性和稳定性，在1型糖尿病非侵入式检测领域具有广阔前景。
