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利用聚焦电子束诱导沉积生长的磁力显微镜探针的长期性能。

Long-Term Performance of Magnetic Force Microscopy Tips Grown by Focused Electron Beam Induced Deposition.

机构信息

Instituto de Nanociencia y Materiales de Aragón (INMA), CSIC-Universidad de Zaragoza, 50009 Zaragoza, Spain.

NenoVision s.r.o., 61200 Brno, Czech Republic.

出版信息

Sensors (Basel). 2023 Mar 7;23(6):2879. doi: 10.3390/s23062879.

DOI:10.3390/s23062879
PMID:36991589
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10052145/
Abstract

High-resolution micro- and nanostructures can be grown using Focused Electron Beam Induced Deposition (FEBID), a direct-write, resist-free nanolithography technology which allows additive patterning, typically with sub-100 nm lateral resolution, and down to 10 nm in optimal conditions. This technique has been used to grow magnetic tips for use in Magnetic Force Microscopy (MFM). Due to their high aspect ratio and good magnetic behavior, these FEBID magnetic tips provide several advantages over commercial magnetic tips when used for simultaneous topographical and magnetic measurements. Here, we report a study of the durability of these excellent candidates for high-resolution MFM measurements. A batch of FEBID-grown magnetic tips was subjected to a systematic analysis of MFM magnetic contrast for 30 weeks, using magnetic storage tape as a test specimen. Our results indicate that these FEBID magnetic tips operate effectively over a long period of time. The magnetic signal was well preserved, with a maximum reduction of 60% after 21 weeks of recurrent use. No significant contrast degradation was observed after 30 weeks in storage.

摘要

高分辨率的微观和纳米结构可以使用聚焦电子束诱导沉积（FEBID）来生长，这是一种直接写入、无抗蚀剂的纳米光刻技术，允许进行添加剂图案化，通常具有小于 100nm 的横向分辨率，在最佳条件下甚至可以达到 10nm。该技术已用于生长用于磁力显微镜（MFM）的磁性尖端。由于其高纵横比和良好的磁性，与用于同时进行形貌和磁性测量的商业磁性尖端相比，这些 FEBID 磁性尖端具有几个优势。在这里，我们报告了对这些高分辨率 MFM 测量的优秀候选者的耐用性的研究。一批生长的 FEBID 磁性尖端被系统地分析了 30 周的 MFM 磁对比，使用磁存储带作为测试样品。我们的结果表明，这些 FEBID 磁性尖端可以长时间有效地工作。磁信号保存完好，经过 21 周的反复使用后最大减少了 60%。在储存 30 周后，没有观察到明显的对比度下降。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/b3606a781f83/sensors-23-02879-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/b8ef281d83e9/sensors-23-02879-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/54938224d6a8/sensors-23-02879-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/34ea54149b5d/sensors-23-02879-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/c2723b4d3128/sensors-23-02879-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/5e477902f627/sensors-23-02879-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/b3606a781f83/sensors-23-02879-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/b8ef281d83e9/sensors-23-02879-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/54938224d6a8/sensors-23-02879-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/34ea54149b5d/sensors-23-02879-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/c2723b4d3128/sensors-23-02879-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/5e477902f627/sensors-23-02879-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/b54f/10052145/b3606a781f83/sensors-23-02879-g006.jpg

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