Magén César, Pablo-Navarro Javier, De Teresa José María
Instituto de Nanociencia y Materiales de Aragón (INMA), Universidad de Zaragoza-CSIC, 50009 Zaragoza, Spain.
Laboratorio de Microscopías Avanzadas (LMA), Universidad de Zaragoza, 50018 Zaragoza, Spain.
Nanomaterials (Basel). 2021 Feb 4;11(2):402. doi: 10.3390/nano11020402.
Focused-electron-beam-induced deposition (FEBID) is the ultimate additive nanofabrication technique for the growth of 3D nanostructures. In the field of nanomagnetism and its technological applications, FEBID could be a viable solution to produce future high-density, low-power, fast nanoelectronic devices based on the domain wall conduit in 3D nanomagnets. While FEBID has demonstrated the flexibility to produce 3D nanostructures with almost any shape and geometry, the basic physical properties of these out-of-plane deposits are often seriously degraded from their bulk counterparts due to the presence of contaminants. This work reviews the experimental efforts to understand and control the physical processes involved in 3D FEBID growth of nanomagnets. Co and Fe FEBID straight vertical nanowires have been used as benchmark geometry to tailor their dimensions, microstructure, composition and magnetism by smartly tuning the growth parameters, post-growth purification treatments and heterostructuring.
聚焦电子束诱导沉积（FEBID）是用于三维纳米结构生长的终极增材纳米制造技术。在纳米磁性及其技术应用领域，FEBID可能是一种可行的解决方案，用于制造基于三维纳米磁体中畴壁管道的未来高密度、低功耗、快速纳米电子器件。虽然FEBID已证明能够灵活制造几乎任何形状和几何结构的三维纳米结构，但由于存在污染物，这些面外沉积物的基本物理性质往往与其块状对应物相比严重退化。这项工作回顾了为理解和控制纳米磁体三维FEBID生长所涉及的物理过程而进行的实验努力。通过巧妙调整生长参数、生长后纯化处理和异质结构，已将钴和铁的FEBID垂直直纳米线用作基准几何结构来调整其尺寸、微观结构、成分和磁性。
