Xu Yanan, Rana Mukti, Díaz-Aponte Kevin
Division of Physics, Engineering, Mathematics, and Computer Science in Delaware State University, United States of America.
Heliyon. 2023 Mar 24;9(4):e14886. doi: 10.1016/j.heliyon.2023.e14886. eCollection 2023 Apr.
The microbolometer is an important device that has a variety of civilian, industrial, and military applications, especially in remote sensing and night vision. Microbolometers are sensor elements in uncooled infrared sensors, which makes the uncooled infrared sensors have the advantage of being smaller in size, light in weight and less expensive compared with cooled infrared sensors. If the microbolometers are arranged in a two-dimensional array, a thermo-graph of the object can be determined using a microbolometer based uncooled infrared sensor. Building the electro-thermal modeling over the microbolometer pixel is essential to determine the uncooled infrared sensor's performance, optimize the sensor's design structure and monitor its condition. Due to the fact that the knowledge for the complex semiconductor-material-based microbolometers over various kinds of design structures with the adjustable thermal conductance is limited so far, this work focuses on the thermal distribution first by considering factors of the radiation absorption, thermal conductance, convection feature and joule heating on varied geometry design structures using Finite Element Analysis (FEA) methods. Then the change of thermal conductance is depicted when the simulated voltage is applied quantitatively between the microplate and electrode through the dynamic interaction of the electro force and the structure deformation via the electro particles redistribution balance by utilizing the Microeletromechanical system (MEMS). In addition, a more accurate contact voltage is derived through the numerical simulation compared with the previous theoretical value and is also verified by the experiment.
微测辐射热计是一种重要的器件，具有多种民用、工业和军事应用，尤其是在遥感和夜视领域。微测辐射热计是非制冷红外传感器中的传感元件，这使得非制冷红外传感器与制冷红外传感器相比具有尺寸更小、重量更轻和成本更低的优势。如果将微测辐射热计排列成二维阵列，就可以使用基于微测辐射热计的非制冷红外传感器确定物体的热成像图。建立微测辐射热计像素的电热模型对于确定非制冷红外传感器的性能、优化传感器的设计结构以及监测其状态至关重要。由于目前对于基于复杂半导体材料的微测辐射热计在各种具有可调热导率的设计结构方面的知识有限，因此这项工作首先通过有限元分析（FEA）方法，考虑辐射吸收、热导率、对流特性和焦耳热等因素对不同几何设计结构的热分布进行研究。然后，利用微机电系统（MEMS），通过电力与结构变形的动态相互作用以及电粒子重新分布平衡，在微板和电极之间定量施加模拟电压时，描绘热导率的变化。此外，通过数值模拟得出了比先前理论值更精确的接触电压，并通过实验进行了验证。
