Aponte Kevin O Díaz, Xu Yanan, Rana Mukti
Division of Physics, Engineering, Mathematics and Computer Sciences, Delaware State University, Dover, DE 19901, USA.
Optical Center for Applied Research, Delaware State University, Dover, DE 19901, USA.
Micromachines (Basel). 2023 Apr 27;14(5):948. doi: 10.3390/mi14050948.
The rapid expansion of the applications of infrared (IR) sensing in the commercial market has driven the need to develop new materials and detector designs for enhanced performance. In this work, we describe the design of a microbolometer that uses two cavities to suspend two layers (sensing and absorber). Here, we implemented the finite element method (FEM) from COMSOL Multiphysics to design the microbolometer. We varied the layout, thickness, and dimensions (width and length) of different layers one at a time to study the heat transfer effect for obtaining the maximum figure of merit. This work reports the design, simulation, and performance analysis of the figure of merit of a microbolometer that uses GeSiSnO thin films as the sensing layer. From our design, we obtained an effective thermal conductance of 1.0135×10-7 W/K, a time constant of 11 ms, responsivity of 5.040×105 V/W, and detectivity of 9.357×107 cm-Hz1/2/W considering a 2 μA bias current.
红外（IR）传感在商业市场应用的迅速扩展，推动了对开发具有更高性能的新材料和探测器设计的需求。在这项工作中，我们描述了一种微测辐射热计的设计，该微测辐射热计使用两个腔体来悬浮两层（传感层和吸收层）。在此，我们采用COMSOL Multiphysics中的有限元方法（FEM）来设计微测辐射热计。我们一次改变不同层的布局、厚度和尺寸（宽度和长度），以研究热传递效应，从而获得最大品质因数。这项工作报告了一种以GeSiSnO薄膜作为传感层的微测辐射热计的品质因数的设计、模拟和性能分析。根据我们的设计，在考虑2 μA偏置电流的情况下，我们获得了1.0135×10-7 W/K的有效热导率、11 ms的时间常数、5.040×105 V/W的响应度以及9.357×107 cm-Hz1/2/W的探测率。
