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基于反向替位生长法制备的石墨烯/βGa 2 O 3 :N/ GaN p-i-n 异质结的高速响应日盲深紫外光电探测器,具有高探测率。

Rapid Response Solar Blind Deep UV Photodetector with High Detectivity Based On Graphene:N/βGa O :N/GaN p-i-n Heterojunction Fabricated by a Reversed Substitution Growth Method.

机构信息

Key Laboratory of UV Light Emitting Materials and Technology, Ministry of Education, Northeast Normal University, Changchun, 130024, China.

Department of Electrical Engineering, The City College of New York, New York, NY, 10031, USA.

出版信息

Small Methods. 2023 Jul;7(7):e2300041. doi: 10.1002/smtd.202300041. Epub 2023 Apr 25.

Abstract

This work reports a high-detectivity solar-blind deep ultraviolet photodetector with a fast response speed, based on a nitrogen-doped graphene/βGa O /GaN p-i-n heterojunction. The i layer of βGa O with a Fermi level lower than the central level of the forbidden band of 0.2 eV is obtained by reversed substitution growth with oxygen replacing nitrogen in the GaN matrix, indicating the majority carrier is hole. X-ray diffractometershows that the transformation of GaN into βGa O with (-201) preferred orientation at temperature above 900 °C in an oxygen ambient. The heterojunction shows enhanced self-powered solar blind detection ability with a response time of 3.2 µs (rise)/0.02 ms (delay) and a detectivity exceeding 10 Jones. Under a reverse bias of -5 V, the photoresponsivity is 8.3 A W with a high I /I ratio of over 10 and a detectivity of ≈9 × 10 Jones. The excellent performance of the device is attributed to 1) the continuous conduction band without a potential energy barrier, 2) the larger built-in potential in the heterojunction because of the downward shift of Fermi energy level in β-Ga O , and 3) an enhanced built-in electric field in the βGa O due to introducing p-type graphene with a high hole concentration of up to ≈10 cm .

摘要

本工作报道了一种基于氮掺杂石墨烯/β-Ga2O3/GaN p-i-n 异质结的高灵敏度、快速响应速度的深紫外日盲光电探测器。通过在 GaN 基质中用氧取代氮进行反向替位生长,得到了费米能级低于禁带中心能级 0.2eV 的β-Ga2O3的 i 层,表明多数载流子为空穴。X 射线衍射仪表明,GaN 在氧气氛中于 900°C 以上温度下转变为具有(-201)择优取向的β-Ga2O3。在-5V 的反向偏压下,该异质结具有增强的自供电日盲探测能力,响应时间为 3.2µs(上升)/0.02ms(延迟),探测率超过 10 琼斯。在-5V 的反向偏压下,光响应率为 8.3A W,具有超过 10 的高 I / I 比和约 9×10 琼斯的探测率。该器件的优异性能归因于:1)连续的导带,没有势能垒;2)由于β-Ga2O3中的费米能级向下移动,异质结中具有更大的内建电势;3)由于引入了具有高达约 1017cm-3的高浓度空穴的 p 型石墨烯,β-Ga2O3中增强了内建电场。

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