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直流磁控溅射法制备的 FeCo/Si 多层膜中铁钴层厚度对界面非对称性的影响。

Influence of FeCo layer thickness on the interfacial asymmetry of FeCo/Si multilayers fabricated by direct current magnetron sputtering.

出版信息

Appl Opt. 2023 Mar 1;62(7):B1-B6. doi: 10.1364/AO.473881.

Abstract

FeCo/Si is a promising material combination for polarized neutron supermirrors because of its appropriate optical constants. Five FeCo/Si multilayers with monotonically increasing FeCo layer thicknesses were fabricated. Grazing incidence x-ray reflectometry and high-resolution transmission electron microscopy were performed to characterize the interdiffusion and asymmetry of the interfaces. Selected area electron diffraction was used to determine the crystalline states of FeCo layers. It was found that the asymmetric interface diffusion layers existed in FeCo/Si multilayers. Furthermore, the FeCo layer started the transition from amorphous to crystalline when the thickness of the FeCo layer reached 4.0 nm.

摘要

FeCo/Si 是一种很有前途的极化中子超镜材料组合,因为它具有适当的光学常数。制备了五个具有单调增加的 FeCo 层厚度的 FeCo/Si 多层膜。采用掠入射 X 射线反射法和高分辨率透射电子显微镜对界面的互扩散和不对称性进行了表征。选区电子衍射用于确定 FeCo 层的晶体状态。结果发现,FeCo/Si 多层膜中存在不对称的界面扩散层。此外,当 FeCo 层的厚度达到 4.0nm 时,FeCo 层开始从非晶态向晶态转变。

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