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用于氮化硅集成电路的低损耗光纤-芯片边缘耦合器。

Low-loss fiber-to-chip edge coupler for silicon nitride integrated circuits.

出版信息

Opt Express. 2023 Mar 13;31(6):10525-10532. doi: 10.1364/OE.483907.

Abstract

Silicon nitride (SiN) integrated optical waveguides have found a wide range of applications due to their low loss, broad wavelength transmission band and high nonlinearity. However, the large mode mismatch between the single-mode fiber and the SiN waveguide creates a challenge of fiber coupling to these waveguides. Here, we propose a coupling approach between fiber and SiN waveguides by utilizing the high-index doped silica glass (HDSG) waveguide as the intermediary to smooth out the mode transition. We achieved fiber-to-SiN waveguide coupling efficiency of lower than 0.8 dB/facet across the full C and L bands with high fabrication and alignment tolerances.

摘要

氮化硅(SiN)集成光波导由于其低损耗、宽波长传输带和高非线性而得到了广泛的应用。然而,单模光纤和 SiN 波导之间的大模式失配给这些波导的光纤耦合带来了挑战。在这里,我们提出了一种利用高折射率掺杂石英玻璃(HDSG)波导作为中介来平滑模式过渡的光纤与 SiN 波导之间的耦合方法。我们实现了光纤到 SiN 波导的耦合效率,在整个 C 和 L 波段,每个面的耦合效率低于 0.8dB,具有较高的制造和对准容差。

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