Qiao Yan, Shi Zhan, Xu Yutao, Wei Xueyong, Elhady Alaaeldin, Abdel-Rahman Eihab, Huan Ronghua, Zhang Wenming
State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China.
Department of Mechanics, Key Laboratory of Soft Machines and Smart Devices of Zhejiang Province, Zhejiang University, Hangzhou, China.
Microsyst Nanoeng. 2023 May 16;9:58. doi: 10.1038/s41378-023-00522-2. eCollection 2023.
MEMS resonators exhibit rich dynamic behaviors under the internal resonance regime. In this work, we present a novel MEMS bifurcation sensor that exploits frequency unlocking due to a 1:3 internal resonance between two electrostatically coupled micro-resonators. The proposed detection mechanism allows the sensor to operate in binary (digital) and analog modes, depending on whether the sensor merely detects a significant jump event in the peak frequency upon unlocking or measures the shift in the peak frequency after unlocking and uses it in conjunction with a calibration curve to estimate the corresponding change in stimulus. We validate the success of this sensor paradigm by experimentally demonstrating charge detection. High charge resolutions are achieved in binary mode, up to 0.137 fC, and in analog mode, up to 0.01 fC. The proposed binary sensor enables extraordinarily high detection resolutions due to the excellent frequency stability under internal resonance and the high signal-to-noise ratio of the shift in peak frequency. Our findings offer new opportunities for high-performance ultrasensitive sensors.
微机电系统（MEMS）谐振器在内部共振状态下表现出丰富的动态行为。在这项工作中，我们提出了一种新型的MEMS分岔传感器，该传感器利用了两个静电耦合微谐振器之间1:3内部共振导致的频率解锁。所提出的检测机制使传感器能够根据其是仅检测解锁时峰值频率的显著跳跃事件，还是测量解锁后峰值频率的偏移并结合校准曲线来估计相应的刺激变化，从而在二进制（数字）和模拟模式下运行。我们通过实验演示电荷检测来验证这种传感器范式的成功。在二进制模式下实现了高达0.137 fC的高电荷分辨率，在模拟模式下则高达0.01 fC。由于内部共振下出色的频率稳定性以及峰值频率偏移的高信噪比，所提出的二进制传感器实现了极高的检测分辨率。我们的研究结果为高性能超灵敏传感器提供了新的机遇。
