Department of Physics, University of Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland.
IBM Research Europe-Zürich, Säumerstrasse 4, CH-8803 Rüschlikon, Switzerland.
Rev Sci Instrum. 2023 May 1;94(5). doi: 10.1063/5.0139825.
Fast feedback from cryogenic electrical characterization measurements is key for the development of scalable quantum computing technology. At room temperature, high-throughput device testing is accomplished with a probe-based solution, where electrical probes are repeatedly positioned onto devices for acquiring statistical data. In this work, we present a probe station that can be operated from room temperature down to below 2 K. Its small size makes it compatible with standard cryogenic measurement setups with a magnet. A large variety of electronic devices can be tested. Here, we demonstrate the performance of the prober by characterizing silicon fin field-effect transistors as a host for quantum dot spin qubits. Such a tool can massively accelerate the design-fabrication-measurement cycle and provide important feedback for process optimization toward building scalable quantum circuits.
快速反馈的低温电学特性测量对于可扩展量子计算技术的发展至关重要。在室温下,通过基于探针的解决方案实现高通量器件测试,其中探针被反复定位到器件上以获取统计数据。在这项工作中,我们展示了一种可以在室温下操作到低于 2 K 的探针台。其小尺寸使其与带有磁铁的标准低温测量装置兼容。可以测试各种电子设备。在这里,我们通过对作为量子点自旋量子位的硅鳍场效应晶体管进行特性分析来展示该探针的性能。这样的工具可以极大地加速设计-制造-测量周期,并为构建可扩展量子电路的工艺优化提供重要反馈。