Barelli Matteo, Vidal Cynthia, Fiorito Sergio, Myslovska Alina, Cielecki Dimitrie, Aglieri Vincenzo, Moreels Iwan, Sapienza Riccardo, Di Stasio Francesco
Photonic Nanomaterials, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genoa, Italy.
The Blackett Laboratory, Department of Physics, Imperial College London, London SW7 2AZ, U.K.
ACS Photonics. 2023 May 1;10(5):1662-1670. doi: 10.1021/acsphotonics.3c00351. eCollection 2023 May 17.
The controlled placement of colloidal semiconductor nanocrystals (NCs) onto planar surfaces is crucial for scalable fabrication of single-photon emitters on-chip, which are critical elements of optical quantum computing, communication, and encryption. The positioning of colloidal semiconductor NCs such as metal chalcogenides or perovskites is still challenging, as it requires a nonaggressive fabrication process to preserve the optical properties of the NCs. In this work, periodic arrays of 2500 nanoholes are patterned by electron beam lithography in a poly(methyl methacrylate) (PMMA) thin film on indium tin oxide/glass substrates. Colloidal core/shell CdSe/CdS NCs, functionalized with a SiO capping layer to increase their size and facilitate deposition into 100 nm holes, are trapped with a close to optimal Poisson distribution into the PMMA nanoholes via a capillary assembly method. The resulting arrays of NCs contain hundreds of single-photon emitters each. We believe this work paves the way to an affordable, fast, and practical method for the fabrication of nanodevices, such as single-photon-emitting light-emitting diodes based on colloidal semiconductor NCs.
将胶体半导体纳米晶体（NCs）可控地放置在平面表面上，对于在芯片上可扩展地制造单光子发射器至关重要，而单光子发射器是光量子计算、通信和加密的关键元件。诸如金属硫族化物或钙钛矿之类的胶体半导体NCs的定位仍然具有挑战性，因为这需要一种温和的制造工艺来保留NCs的光学特性。在这项工作中，通过电子束光刻在氧化铟锡/玻璃基板上的聚甲基丙烯酸甲酯（PMMA）薄膜中制备了具有2500个纳米孔的周期性阵列。用SiO覆盖层功能化的胶体核/壳CdSe/CdS NCs，以增加其尺寸并便于沉积到100nm的孔中，通过毛细管组装方法以接近最佳泊松分布的方式捕获到PMMA纳米孔中。所得的NCs阵列每个都包含数百个单光子发射器。我们相信这项工作为制造纳米器件，例如基于胶体半导体NCs的单光子发光发光二极管，铺平了一条经济、快速且实用的方法之路。
