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AlN 应变量补偿层对外延生长之外的 InGaN 量子阱红光发光二极管的影响。

Effect of the AlN strain compensation layer on InGaN quantum well red-light-emitting diodes beyond epitaxy.

出版信息

Opt Lett. 2022 Dec 1;47(23):6229-6232. doi: 10.1364/OL.476727.

Abstract

An atomically thick AlN layer is typically used as the strain compensation layer (SCL) for InGaN-based-red light-emitting diodes (LEDs). However, its impacts beyond strain control have not been reported, despite its drastically different electronic properties. In this Letter, we describe the fabrication and characterization of InGaN-based red LEDs with a wavelength of 628 nm. A 1-nm AlN layer was inserted between the InGaN quantum well (QW) and the GaN quantum barrier (QB) as the SCL. The output power of the fabricated red LED is greater than 1 mW at 100 mA current, and its peak on-wafer wall plug efficiency (WPE) is approximately 0.3%. Based on the fabricated device, we then used numerical simulation to systematically study the effect of the AlN SCL on the LED emission wavelength and operating voltage. The results show that the AlN SCL enhances the quantum confinement and modulates the polarization charges, modifying the device band bending and the subband energy level in the InGaN QW. Thus, the insertion of the SCL considerably affects the emission wavelength, and the effect on the emission wavelength varies with the SCL thickness and the Ga content introduced into the SCL. In addition, the AlN SCL in this work reduces the LED operating voltage by modulating the polarization electric field and energy band, facilitating carrier transport. This implies that heterojunction polarization and band engineering is an approach that can be extended to optimize the LED operating voltage. We believe our study better identifies the role of the AlN SCL in InGaN-based red LEDs, promoting their development and commercialization.

摘要

通常,原子层厚的 AlN 层被用作应变补偿层(SCL),用于基于 InGaN 的红光发光二极管(LED)。然而,尽管其电子性质截然不同,但除了应变控制之外,其影响尚未得到报道。在本信中,我们描述了具有 628nm 波长的基于 InGaN 的红光 LED 的制造和特性。在 InGaN 量子阱(QW)和 GaN 量子势垒(QB)之间插入了 1nm AlN 层作为 SCL。在 100mA 电流下,所制造的红色 LED 的输出功率大于 1mW,其峰值晶圆上的墙壁插头效率(WPE)约为 0.3%。基于所制造的器件,我们然后使用数值模拟系统地研究了 AlN SCL 对 LED 发射波长和工作电压的影响。结果表明,AlN SCL 增强了量子限制并调制了极化电荷,从而改变了器件的能带弯曲和 InGaN QW 的子带能级。因此,SCL 的插入极大地影响了发射波长,并且对发射波长的影响随 SCL 厚度和 SCL 中引入的 Ga 含量而变化。此外,本工作中的 AlN SCL 通过调制极化电场和能带降低了 LED 的工作电压,促进了载流子的输运。这意味着异质结极化和能带工程是一种可以扩展到优化 LED 工作电压的方法。我们相信,我们的研究更好地确定了 AlN SCL 在基于 InGaN 的红光 LED 中的作用,促进了它们的发展和商业化。

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