Opt Express. 2023 Jun 5;31(12):19843-19852. doi: 10.1364/OE.489554.
In this work, we present a multi-mode resonator based on SU-8 polymer and experimentally verify that the resonator showed mode discrimination can be used as a sensor with high performance. According to field emission scanning electron microscopy (FE-SEM) images, the fabricated resonator shows sidewall roughness which is canonically considered to be undesirable after a typical development process. In order to analyze the effect of sidewall roughness, we conduct the resonator simulation considering the roughness under various conditions. Mode discrimination still occurs even in the presence of sidewall roughness. In addition, waveguide width controllable by UV exposure time effectively contributes to mode discrimination. To verify the resonator as a sensor, we perform a temperature variation experiment, which results in a high sensitivity of about 630.8 nm/RIU. This result shows that the multi-mode resonator sensor fabricated via a simple process is competitive with other single-mode waveguide sensors.
在这项工作中，我们提出了一种基于 SU-8 聚合物的多模谐振器，并通过实验验证了该谐振器具有模式分辨能力，可作为高性能传感器使用。根据场发射扫描电子显微镜（FE-SEM）图像，所制造的谐振器显示出侧壁粗糙度，这在典型的开发过程后通常被认为是不理想的。为了分析侧壁粗糙度的影响，我们在各种条件下进行了考虑粗糙度的谐振器模拟。即使存在侧壁粗糙度，模式分辨仍然会发生。此外，通过紫外光曝光时间控制波导宽度可有效实现模式分辨。为了验证谐振器作为传感器的性能，我们进行了温度变化实验，结果表明其具有约 630.8nm/RIU 的高灵敏度。这一结果表明，通过简单工艺制造的多模谐振器传感器与其他单模波导传感器具有竞争力。
