Yu Tingting, Tao Yebo, Wu Yali, Zhang Dongguang, Yang Jiayi, Ge Gang
School of Aerospace Science and Technology, Xidian University, Xi'an 710071, China.
Intelligent Manufacturing College, Jiaxing Vocational & Technical College, Jiaxing 314036, China.
Micromachines (Basel). 2023 Mar 23;14(4):716. doi: 10.3390/mi14040716.
Flexible piezoresistive sensors (FPSs) have the advantages of compact structure, convenient signal acquisition and fast dynamic response; they are widely used in motion detection, wearable electronic devices and electronic skins. FPSs accomplish the measurement of stresses through piezoresistive material (PM). However, FPSs based on a single PM cannot achieve high sensitivity and wide measurement range simultaneously. To solve this problem, a heterogeneous multi-material flexible piezoresistive sensor (HMFPS) with high sensitivity and a wide measurement range is proposed. The HMFPS consists of a graphene foam (GF), a PDMS layer and an interdigital electrode. Among them, the GF serves as a sensing layer, providing high sensitivity, and the PDMS serves as a supporting layer, providing a large measurement range. The influence and principle of the heterogeneous multi-material (HM) on the piezoresistivity were investigated by comparing the three HMFPS with different sizes. The HM proved to be an effective way to produce flexible sensors with high sensitivity and a wide measurement range. The HMFPS-10 has a sensitivity of 0.695 kPa, a measurement range of 0-14,122 kPa, fast response/recovery (83 ms and 166 ms) and excellent stability (2000 cycles). In addition, the potential application of the HMFPS-10 in human motion monitoring was demonstrated.
柔性压阻式传感器（FPSs）具有结构紧凑、信号采集方便和动态响应快等优点；它们广泛应用于运动检测、可穿戴电子设备和电子皮肤。FPSs通过压阻材料（PM）来完成应力测量。然而，基于单一PM的FPSs无法同时实现高灵敏度和宽测量范围。为了解决这个问题，提出了一种具有高灵敏度和宽测量范围的异质多材料柔性压阻式传感器（HMFPS）。HMFPS由石墨烯泡沫（GF）、聚二甲基硅氧烷（PDMS）层和叉指电极组成。其中，GF作为传感层，提供高灵敏度，PDMS作为支撑层，提供大的测量范围。通过比较三种不同尺寸的HMFPS，研究了异质多材料（HM）对压阻率的影响和原理。结果表明，HM是制备具有高灵敏度和宽测量范围的柔性传感器的有效方法。HMFPS-10的灵敏度为0.695 kPa，测量范围为0-14,122 kPa，具有快速响应/恢复（83 ms和166 ms）和优异的稳定性（2000次循环）。此外，还展示了HMFPS-10在人体运动监测中的潜在应用。
