基于单晶蓝宝石的高温光纤法布里-珀罗振动传感器。

High-Temperature Fiber-Optic Fabry-Perot Vibration Sensor Based on Single-Crystal Sapphire.

机构信息

State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, China.

出版信息

Sensors (Basel). 2023 May 21;23(10):4952. doi: 10.3390/s23104952.

DOI:10.3390/s23104952

PMID:37430867

原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10221403/

Abstract

In this paper, a fiber-optic Fabry-Perot (F-P) vibration sensor that can work at 800 °C is proposed. The F-P interferometer is composed of an upper surface of inertial mass placed parallel to the end face of the optical fiber. The sensor was prepared by ultraviolet-laser ablation and three-layer direct-bonding technology. Theoretically, the sensor has a sensitivity of 0.883 nm/g and a resonant frequency of 20.911 kHz. The experimental results show that the sensitivity of the sensor is 0.876 nm/g in the range of 2 g to 20 g at an operating frequency of 200 Hz at 20 °C. The nonlinearity was evaluated from 20 °C to 800 °C with a nonlinear error of 0.87%. In addition, the z-axis sensitivity of the sensor was 25 times higher than that of the -axis and -axis. The vibration sensor will have wide high-temperature engineering-application prospects.

摘要

本文提出了一种可在 800°C 下工作的光纤法布里-珀罗（F-P）振动传感器。F-P 干涉仪由平行于光纤端面放置的惯性质量的上表面组成。传感器通过紫外激光烧蚀和三层直接键合技术制备。理论上，传感器的灵敏度为 0.883nm/g，谐振频率为 20.911kHz。实验结果表明，在 20°C 时，工作频率为 200Hz，在 2g 至 20g 的范围内，传感器的灵敏度为 0.876nm/g。在 20°C 至 800°C 的范围内评估了非线性，非线性误差为 0.87%。此外，传感器的 z 轴灵敏度是 - 轴和 - 轴的 25 倍。该振动传感器将在高温工程应用中有广阔的前景。