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用于室温下太赫兹探测的微机械测辐射热计

Micromechanical Bolometers for Subterahertz Detection at Room Temperature.

作者信息

Vicarelli Leonardo, Tredicucci Alessandro, Pitanti Alessandro

机构信息

Laboratorio NEST, Scuola Normale Superiore and Istituto Nanoscienze - CNR, Piazza San Silvestro 12, 56127 Pisa, Italy.

Dipartimento di Fisica, Università di Pisa, Largo B. Pontecorvo 3, 56127 Pisa, Italy.

出版信息

ACS Photonics. 2022 Feb 16;9(2):360-367. doi: 10.1021/acsphotonics.1c01273. Epub 2022 Jan 28.

DOI:10.1021/acsphotonics.1c01273
PMID:35211645
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC8855436/
Abstract

Fast room-temperature imaging at terahertz (THz) and subterahertz (sub-THz) frequencies is an interesting technique that could unleash the full potential of plenty of applications in security, healthcare, and industrial production. In this Letter, we introduce micromechanical bolometers based on silicon nitride trampoline membranes as broad-range detectors down to sub-THz frequencies. They show, at the longest wavelengths, room-temperature noise-equivalent powers comparable to those of state-of-the-art commercial devices (∼100 pW Hz), which, along with the good operation speed and the easy, large-scale fabrication process, could make the trampoline membrane the next candidate for cheap room-temperature THz imaging and related applications.

摘要

太赫兹（THz）和亚太赫兹（sub-THz）频率下的快速室温成像技术是一项颇具吸引力的技术，它能够充分发挥安全、医疗保健及工业生产等众多应用的全部潜力。在本信函中，我们介绍了基于氮化硅蹦床膜的微机械测辐射热计，它作为宽频探测器，可低至亚太赫兹频率。在最长波长下，它们展现出与最先进的商用设备相当的室温噪声等效功率（约100 pW/Hz），再加上良好的运行速度以及简便的大规模制造工艺，这可能使蹦床膜成为廉价室温太赫兹成像及相关应用的下一个候选者。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/a6280f085dcd/ph1c01273_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/f5b980f75860/ph1c01273_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/8398aa965b9e/ph1c01273_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/7b81e1f47ab8/ph1c01273_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/a6280f085dcd/ph1c01273_0004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/f5b980f75860/ph1c01273_0001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/8398aa965b9e/ph1c01273_0002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/7b81e1f47ab8/ph1c01273_0003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/d2e4/8855436/a6280f085dcd/ph1c01273_0004.jpg

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