Yang Kun, Yin Zhifu, Sun Lei
Shanxi Key Laboratory of Micro Nano Sensors & Artificial Intelligence Perception, College of Information and Computer, Taiyuan University of Technology, Taiyuan 030024, China.
State Key Laboratory of Electrical Insulation and Power Equipment, Xi'an Jiaotong University, Xi'an 710049, China.
Micromachines (Basel). 2023 Jul 16;14(7):1430. doi: 10.3390/mi14071430.
A low-cost method of fabrication of high aspect ratio nano-channels by thermal nano-imprinting and Parylene deposition is proposed. SU-8 photoresist nano-channels were first manufactured by thermal nano-imprinting, and Parylene deposition was carried out to reduce the width of the nano-channels and increase the aspect ratio. During the process, the side walls of the SU-8 nano-channels were covered with the Parylene film, reducing the width of the nano-channels, and the depth of the channels increased due to the thickness of the Parylene film deposited on the surface of the SU-8 nano-channels, more so than that at the bottom. The influence of Parylene mass on the size of nano-channels was studied by theoretical analysis and experiments, and the deposition pressure of Parylene was optimized. The final high aspect ratio nano-channels are 46 nm in width and 746 nm in depth, of which the aspect ratio is 16. This simple and efficient method paves the way for the production of high aspect ratio nano-channels.
提出了一种通过热纳米压印和聚对二甲苯沉积制造高深宽比纳米通道的低成本方法。首先通过热纳米压印制造SU-8光刻胶纳米通道，然后进行聚对二甲苯沉积以减小纳米通道的宽度并增加深宽比。在此过程中，SU-8纳米通道的侧壁被聚对二甲苯薄膜覆盖，减小了纳米通道的宽度，并且由于沉积在SU-8纳米通道表面的聚对二甲苯薄膜的厚度，通道深度增加，通道顶部比底部增加得更多。通过理论分析和实验研究了聚对二甲苯质量对纳米通道尺寸的影响，并优化了聚对二甲苯的沉积压力。最终的高深宽比纳米通道宽度为46 nm，深度为746 nm，深宽比为16。这种简单有效的方法为高深宽比纳米通道的生产铺平了道路。
