柔性薄膜热电偶：从结构、材料、制造到应用
Flexible thin film thermocouples: From structure, material, fabrication to application.
作者信息
Zhang Zhongkai, Liu Zhaojun, Lei Jiaming, Chen Luntao, Li Le, Zhao Na, Fang Xudong, Ruan Yong, Tian Bian, Zhao Libo
机构信息
State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore.
出版信息
iScience. 2023 Jul 10;26(8):107303. doi: 10.1016/j.isci.2023.107303. eCollection 2023 Aug 18.
Flexible thin-film thermocouples (TFTCs) have been garnering interest as temperature sensors due to the advantages of being flexible, ultrathin, and ultralight. Additionally, they have fast response times and enable detection of temperature. These properties have made them suitable for applications such as wearable electronics, healthcare, portable personal devices, and smart detection systems. This review presents the progress in the development of flexible TFTCs. The mechanism, structural design, materials, fabrication methods, and related applications of flexible TFTCs are also elaborated. Finally, future development directions of flexible TFTCs are discussed such as wide-range temperature measurement, multiple sensor integration, and achieving reliable cold-end compensation systems.
柔性薄膜热电偶（TFTC）作为温度传感器一直备受关注，因为它具有柔性、超薄和超轻的优点。此外，它们具有快速响应时间并能够进行温度检测。这些特性使其适用于可穿戴电子设备、医疗保健、便携式个人设备和智能检测系统等应用。本文综述了柔性TFTC的发展进展。还阐述了柔性TFTC的机理、结构设计、材料、制造方法及相关应用。最后，讨论了柔性TFTC的未来发展方向，如宽量程温度测量、多传感器集成以及实现可靠的冷端补偿系统。
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