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可扩展的高迁移率石墨烯/hBN异质结构

Scalable High-Mobility Graphene/hBN Heterostructures.

作者信息

Martini Leonardo, Mišeikis Vaidotas, Esteban David, Azpeitia Jon, Pezzini Sergio, Paletti Paolo, Ochapski Michał W, Convertino Domenica, Hernandez Mar Garcia, Jimenez Ignacio, Coletti Camilla

机构信息

Center for Nanotechnology Innovation@NEST, Istituto Italiano di Tecnologia, Piazza San Silvestro 12, 56127 Pisa, Italy.

Graphene Labs, Istituto Italiano di Tecnologia, Via Morego 30, I-16163 Genova, Italy.

出版信息

ACS Appl Mater Interfaces. 2023 Aug 9;15(31):37794-37801. doi: 10.1021/acsami.3c06120. Epub 2023 Jul 31.

Abstract

Graphene-hexagonal boron nitride (hBN) scalable heterostructures are pivotal for the development of graphene-based high-tech applications. In this work, we demonstrate the realization of high-quality graphene-hBN heterostructures entirely obtained with scalable approaches. hBN continuous films were grown via ion beam-assisted physical vapor deposition directly on commercially available SiO/Si and used as receiving substrates for graphene single-crystal matrixes grown by chemical vapor deposition on copper. The structural, chemical, and electronic properties of the heterostructure were investigated by atomic force microscopy, Raman spectroscopy, and electrical transport measurements. We demonstrate graphene carrier mobilities exceeding 10,000 cm/Vs in ambient conditions, 30% higher than those directly measured on SiO/Si. We prove the scalability of our approach by measuring more than 100 transfer length method devices over a centimeter scale, which present an average carrier mobility of 7500 ± 850 cm/Vs. The reported high-quality all-scalable heterostructures are of relevance for the development of graphene-based high-performing electronic and optoelectronic applications.

摘要

石墨烯-六方氮化硼(hBN)可扩展异质结构对于基于石墨烯的高科技应用的发展至关重要。在这项工作中,我们展示了通过可扩展方法完全实现的高质量石墨烯-hBN异质结构。hBN连续薄膜通过离子束辅助物理气相沉积直接生长在市售的SiO/Si上,并用作通过化学气相沉积在铜上生长的石墨烯单晶基质的接收衬底。通过原子力显微镜、拉曼光谱和电输运测量研究了异质结构的结构、化学和电子性质。我们证明,在环境条件下,石墨烯载流子迁移率超过10000 cm²/V·s,比直接在SiO/Si上测量的迁移率高30%。我们通过在厘米尺度上测量100多个转移长度方法器件来证明我们方法的可扩展性,这些器件的平均载流子迁移率为7500±850 cm²/V·s。所报道的高质量全可扩展异质结构对于基于石墨烯的高性能电子和光电子应用的发展具有重要意义。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/e6d8/10416142/d42a4dbf748f/am3c06120_0002.jpg

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