Park Seong Yeon, On Seung Yoon, Kim Junmo, Lee Jeonyoon, Kim Taek-Soo, Wardle Brian L, Kim Seong Su
Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea.
Department of Aerospace Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 305-701, Republic of Korea.
ACS Appl Mater Interfaces. 2023 Aug 16;15(32):38750-38758. doi: 10.1021/acsami.3c06145. Epub 2023 Aug 3.
Semiconductor packaging based on an epoxy molding compound (EMC) currently has several disadvantages including warpage, limited processing area, and variability that all negatively affect cost and production yield. We propose a facile EMC molding process method using a flash electro-thermal carbon fiber heating (FE-CH) device based on carbon fiber-based papers to manufacture an EMC molded to a copper substrate (EMC/Cu bi-layer package) via Joule heating, and using this device, a modified cure cycle that combines the conventional cure cycle (CCC) with rapid cooling was performed using FE-CH to reduce the curvature of the EMC/Cu bi-layer package. Compared to the conventional hot press process, which uses 3.17 MW of power, the FE-CH process only uses 32.87 kW, resulting in a power consumption reduction of over 100 times when following the CCC. Furthermore, the FE-CH-cured EMC/Cu bi-layer package exhibits mechanical properties equivalent to those of a hot press-cured specimen, including the degree of cure, elastic modulus, curvature, bonding temperature, residual strain, and peel strength. The modified cure cycle using the FE-CH results in a 31% reduction in residual strain, a 32% reduction in curvature, and a 47% increase in peel strength compared to the CCC, indicating that this new process method is very promising for reducing a semiconductor package's price by reducing the process cost and warpage.
基于环氧模塑料(EMC)的半导体封装目前存在几个缺点,包括翘曲、加工面积有限以及变异性,这些都会对成本和生产良率产生负面影响。我们提出了一种简便的EMC成型工艺方法,该方法使用基于碳纤维纸的快速电热碳纤维加热(FE-CH)装置,通过焦耳加热制造模压到铜基板上的EMC(EMC/Cu双层封装),并且使用该装置,通过FE-CH执行将传统固化周期(CCC)与快速冷却相结合的改进固化周期,以降低EMC/Cu双层封装的曲率。与使用3.17兆瓦功率的传统热压工艺相比,FE-CH工艺仅使用32.87千瓦,按照CCC时功耗降低超过100倍。此外,经FE-CH固化的EMC/Cu双层封装表现出与热压固化试样相当的机械性能,包括固化程度、弹性模量、曲率、粘结温度、残余应变和剥离强度。与CCC相比,使用FE-CH的改进固化周期使残余应变降低31%,曲率降低32%,剥离强度提高47%,表明这种新工艺方法在通过降低工艺成本和翘曲来降低半导体封装价格方面非常有前景。