Xu Yiting, Liu Song, Zhang Junfeng, Chai Songyang, Li Jianjun, Xue Changguo, Wu Shangquan
School of Materials Science and Engineering, Anhui University of Science and Technology, Huainan 232001, China.
CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230026, China.
Sensors (Basel). 2023 Aug 5;23(15):6962. doi: 10.3390/s23156962.
In this paper, novel humidity sensors based on montmorillonite, kaolinite, and composite films coated on micro-cantilevers were prepared to measure the relative humidity (RH) values by the deflection of a micro-cantilever (MC) at room temperature. The humidity-sensing properties, such as response and recovery, sensitivity, repeatability, humidity hysteresis, and long-term stability, were investigated in the range of working humidity (10-80% RH). The humidity response in the close humidity range of 10% RH to 80% RH revealed a linear increase in water absorption of montmorillonite, kaolinite, and montmorillonite/kaolinite mixed dispersant (1:1) as a function of RH with linear correlation factors between the humidity change and deflection estimated to be 0.994, 0.991, and 0.946, respectively. Montmorillonite's sensitivity was better than kaolinite's, with the mixed-clay mineral film's response falling somewhere in between. This research provides a feasible and effective approach to constructing high-performance MC humidity sensors that can be operated at room temperature based on clay minerals.
本文制备了基于蒙脱石、高岭土以及涂覆在微悬臂梁上的复合薄膜的新型湿度传感器，用于在室温下通过微悬臂梁（MC）的挠度来测量相对湿度（RH）值。在工作湿度范围（10 - 80%RH）内研究了其湿度传感特性，如响应和恢复特性、灵敏度、重复性、湿度滞后以及长期稳定性。在10%RH至80%RH的相近湿度范围内的湿度响应表明，蒙脱石、高岭土以及蒙脱石/高岭土混合分散剂（1:1）的吸水量随RH呈线性增加，湿度变化与挠度之间的线性相关系数估计分别为0.994、0.991和0.946。蒙脱石的灵敏度优于高岭土，混合粘土矿物薄膜的响应则介于两者之间。本研究为构建基于粘土矿物且可在室温下工作的高性能MC湿度传感器提供了一种可行且有效的方法。
