Van den Broek Wouter, Jannis Daen, Verbeeck Jo
Thermo Fischer Scientific, Achtseweg Noord 5, 5651 GG Eindhoven, Netherlands.
Electron Microscopy for Materials Research (EMAT), University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium; Nanolab center of excellence, University of Antwerp, Groenenborgerlaan 171, 2020 Antwerp, Belgium.
Ultramicroscopy. 2023 Dec;254:113830. doi: 10.1016/j.ultramic.2023.113830. Epub 2023 Aug 14.
In this paper convexity constraints are derived for a background model of electron energy loss spectra (EELS) that is linear in the fitting parameters. The model outperforms a power-law both on experimental and simulated backgrounds, especially for wide energy ranges, and thus improves elemental quantification results. Owing to the model's linearity, the constraints can be imposed through fitting by quadratic programming. This has important advantages over conventional nonlinear power-law fitting such as high speed and a guaranteed unique solution without need for initial parameters. As such, the need for user input is significantly reduced, which is essential for unsupervised treatment of large datasets. This is demonstrated on a demanding spectrum image of a semiconductor device sample with a high number of elements over a wide energy range.
在本文中,针对电子能量损失谱(EELS)的背景模型推导了凸性约束,该模型在拟合参数方面是线性的。在实验背景和模拟背景上,该模型均优于幂律模型,特别是在宽能量范围内,从而改善了元素定量结果。由于该模型的线性,可以通过二次规划拟合来施加约束。这相对于传统的非线性幂律拟合具有重要优势,如速度快且无需初始参数就能保证得到唯一解。因此,显著减少了对用户输入的需求,这对于无监督处理大型数据集至关重要。这在一个具有挑战性的半导体器件样品的能谱图像上得到了证明,该样品在宽能量范围内包含大量元素。