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用紫外激光消融聚合物和生物组织。

Ablation of polymers and biological tissue by ultraviolet lasers.

作者信息

Srinivasan R

出版信息

Science. 1986 Oct 31;234(4776):559-65. doi: 10.1126/science.3764428.

Abstract

When pulsed, ultraviolet laser radiation falls on the surface of an organic polymer or biological tissue, the material at the surface is spontaneously etched away to a depth of 0.1 to several micrometers. In the process, the depth of etching is controlled by the width of the pulse and the fluence of the laser, and there is no detectable thermal damage to the substrate. The material that is removed by etching consists of products ranging from atoms to small fragments of the polymer. They are ejected at supersonic velocities. This dry photoetching technique is useful in patterning polymer films. It is also under serious investigation in several areas in surgery.

摘要

当脉冲紫外激光辐射照射到有机聚合物或生物组织表面时,表面材料会自发蚀刻掉0.1至几微米的深度。在此过程中,蚀刻深度由脉冲宽度和激光能量密度控制,并且对基底没有可检测到的热损伤。通过蚀刻去除的材料包括从原子到聚合物小片段的各种产物。它们以超音速速度喷射出去。这种干式光刻技术在聚合物薄膜图案化方面很有用。它也正在外科手术的几个领域中进行深入研究。

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