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用于高功率电子器件的新型铜包银微/纳米颗粒混合浆料及其通过电磁感应的快速烧结技术

Novel Cu@Ag Micro/Nanoparticle Hybrid Paste and Its Rapid Sintering Technique via Electromagnetic Induction for High-Power Electronics.

作者信息

Wu Zhuohuan, Liu Wei, Feng Jiayun, Wen Zhicheng, Zhang Xinyue, Wang Xinming, Wang Chunqing, Tian Yanhong

机构信息

State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China.

出版信息

ACS Omega. 2023 Aug 16;8(34):31021-31029. doi: 10.1021/acsomega.3c02854. eCollection 2023 Aug 29.

Abstract

Due to the harsh working environments up to 600 °C, the exploration of high-temperature interconnection materials is significantly important for high-power devices. In this study, a hybrid paste including Cu@Ag core-shell microparticles (MPs) and Ag nanoparticles (NPs) was designed to achieve Cu-Cu bonding. The Cu@Ag MPs exhibited excellent oxidation stability in an air atmosphere with the Ag layer coating on the Cu core. Ag NPs fill the pores among the Cu@Ag MPs and reduce the sintering temperature of the hybrid paste. The Cu-hybrid paste-Cu joints were formed via electromagnetic induction heating within approximately 15 s. When sintered at 26 kW, the shear strength of the joint reached 48 MPa, the porosity decreased to 0.73%, and the resistivity was down to 13.25 μΩ·cm. Furthermore, a possible interconnection mechanism at the contact interface between the Cu substrate and the sintered hybrid paste was proposed, which is related to the melting point of metal particles and the effect of magnetic eddy currents. This fast bonding technology inspires a new approach to interconnection for high-power devices under high operation temperatures.

摘要

由于高达600°C的恶劣工作环境,探索高温互连材料对于高功率器件而言极为重要。在本研究中,设计了一种包含Cu@Ag核壳微粒(MPs)和Ag纳米颗粒(NPs)的混合浆料,以实现Cu-Cu键合。Cu@Ag MPs在空气气氛中表现出优异的氧化稳定性,其Cu核上包覆有Ag层。Ag NPs填充了Cu@Ag MPs之间的孔隙,并降低了混合浆料的烧结温度。通过电磁感应加热在约15秒内形成了Cu-混合浆料-Cu接头。当以26 kW烧结时,接头的剪切强度达到48 MPa,孔隙率降至0.73%,电阻率降至13.25 μΩ·cm。此外,还提出了Cu基板与烧结混合浆料之间接触界面处可能的互连机制,这与金属颗粒的熔点和磁涡电流的作用有关。这种快速键合技术为高工作温度下的高功率器件互连带来了一种新方法。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/ae25/10468888/7efa060bd042/ao3c02854_0001.jpg

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