Zhang Junning, Zhang Xinyue, Wang Yan, Lv Tunan, Yu Hongbin
Opt Lett. 2023 Sep 15;48(18):4777-4780. doi: 10.1364/OL.500972.
An AlN-based piezoelectric micro-electromechanical system (MEMS) continuous membrane deformable mirror (DM) prototype is presented for the first time. Its effective aperture diameter is 5 mm and it is equipped with 25 independently controlled actuators. Owing to the advantages associated with the AlN piezoelectric thin-film technology, attractive characteristics including CMOS compatible fabrication, bidirectional linear and negligible hysteresis actuation, and excellent linear superposition control capability have been successfully demonstrated. Moreover, good optical aberration correction performance is also validated via the surface contour fitting experiment to the Zernike polynomials up to the first 14 orders despite the non-optimized device structure design, representing great application perspective.
首次展示了一种基于氮化铝的压电微机电系统（MEMS）连续膜变形镜（DM）原型。其有效孔径直径为5毫米，配备有25个独立控制的致动器。由于氮化铝压电薄膜技术的优势，已成功展示了包括CMOS兼容制造、双向线性和可忽略的滞后驱动以及出色的线性叠加控制能力等吸引人的特性。此外，尽管器件结构设计未优化，但通过对高达前14阶的泽尼克多项式进行表面轮廓拟合实验，也验证了良好的光学像差校正性能，展现出巨大的应用前景。
