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使用飞秒激光进行体玻璃改性：重复单脉冲、兆赫兹脉冲串和吉赫兹脉冲串模式之间的比较。

In-Volume Glass Modification Using a Femtosecond Laser: Comparison Between Repetitive Single-Pulse, MHz Burst, and GHz Burst Regimes.

作者信息

Lafargue Manon, Guilberteau Théo, Balage Pierre, Gavory Bastien, Lopez John, Manek-Hönninger Inka

机构信息

Université de Bordeaux-CNRS-CEA, CELIA UMR5107, 33405 Talence, France.

Amplitude, Cité de la Photonique, 11 Avenue de Canteranne, 33600 Pessac, France.

出版信息

Materials (Basel). 2024 Dec 27;18(1):78. doi: 10.3390/ma18010078.

DOI:10.3390/ma18010078
PMID:39795723
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11722311/
Abstract

In this study, we report, for the first time, to the best of our knowledge, on in-volume glass modifications produced by GHz bursts of femtosecond pulses. We compare three distinct methods of energy deposition in glass, i.e., the single-pulse, MHz burst, and GHz burst regimes, and evaluate the resulting modifications. Specifically, we investigate in-volume modifications produced by each regime under varying parameters such as the pulse/burst energy, the scanning velocity, and the number of pulses in the burst, with the aim of establishing welding process windows for both sodalime and fused silica.

摘要

在本研究中，据我们所知，我们首次报告了飞秒脉冲的千兆赫兹脉冲串所产生的玻璃内部改性情况。我们比较了玻璃中三种不同的能量沉积方法，即单脉冲、兆赫兹脉冲串和千兆赫兹脉冲串模式，并评估了由此产生的改性效果。具体而言，我们研究了在不同参数（如脉冲/脉冲串能量、扫描速度和脉冲串中的脉冲数）下，每种模式所产生的玻璃内部改性情况，目的是为钠钙玻璃和熔融石英建立焊接工艺窗口。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/9a968d9b3331/materials-18-00078-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/af4725708701/materials-18-00078-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/91ed0d14ff94/materials-18-00078-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/dae1869d7c92/materials-18-00078-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/c918fe33d3fe/materials-18-00078-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/f8bac9b166b7/materials-18-00078-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/5ff0361b3925/materials-18-00078-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/a845540ffd24/materials-18-00078-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/03a1e41d2a1f/materials-18-00078-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/cec0e584be36/materials-18-00078-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/9a968d9b3331/materials-18-00078-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/af4725708701/materials-18-00078-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/91ed0d14ff94/materials-18-00078-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/dae1869d7c92/materials-18-00078-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/c918fe33d3fe/materials-18-00078-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/f8bac9b166b7/materials-18-00078-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/5ff0361b3925/materials-18-00078-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/a845540ffd24/materials-18-00078-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/03a1e41d2a1f/materials-18-00078-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/cec0e584be36/materials-18-00078-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/dae6/11722311/9a968d9b3331/materials-18-00078-g010.jpg

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本文引用的文献

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Micromachines (Basel). 2023 Aug 22;14(9):1650. doi: 10.3390/mi14091650.
2
Advances in Femtosecond Laser GHz-Burst Drilling of Glasses: Influence of Burst Shape and Duration.飞秒激光千兆赫脉冲串钻孔技术在玻璃加工中的进展：脉冲串形状和持续时间的影响
Micromachines (Basel). 2023 May 30;14(6):1158. doi: 10.3390/mi14061158.
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Enhanced ablation efficiency using GHz bursts in micromachining fused silica.在微加工熔融石英中使用千兆赫兹脉冲串提高消融效率。
Opt Lett. 2021 Jan 15;46(2):282-285. doi: 10.1364/OL.415959.
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Systematic study of laser ablation with GHz bursts of femtosecond pulses.飞秒脉冲GHz爆发的激光烧蚀系统研究。
Opt Express. 2020 Sep 14;28(19):27702-27714. doi: 10.1364/OE.400624.
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Process regimes during welding of glass by femtosecond laser pulse bursts.飞秒激光脉冲串焊接玻璃时的工艺制度。
Appl Opt. 2020 Aug 1;59(22):6452-6458. doi: 10.1364/AO.392702.
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Characteristics of an Implantable Blood Pressure Sensor Packaged by Ultrafast Laser Microwelding.采用超快激光微焊接封装的植入式血压传感器的特性。
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