Tan Hongyu, Pan Debin, Wang Chensheng, Yao Yuan
Wuhan National Lab for Optoelectronics, Huazhong Institute of Electro-Optics, Wuhan 430074, China.
Micromachines (Basel). 2023 Sep 29;14(10):1870. doi: 10.3390/mi14101870.
The cavity optomechanical accelerometer based on photonic crystal microcavities combines mechanical resonators with high-quality factor photonic crystal cavities. The mechanical vibrator is sensitive to weak force/displacement in mechanical resonance modes, which can achieve extremely low noise levels and theoretically reach the standard qillatum noise limit. It is an important development direction for high-precision accelerometers. This article analyzes the principle and structural characteristics of a zipper type photonic crystal cavity optomechanical accelerometer, and designs a silicon-based zipper type photonic crystal cavity and mechanical vibrator structure applied to the accelerometer. The influence of the structural parameters of the zipper cavity on the optical Q factor was analyzed in detail. The resonant frequency of the optical cavity was controlled around 195 THz by adjusting the structural parameters, and the mechanical resonance characteristics of the mechanical vibrator and the optical cavity were analyzed. The effective mass of the optical cavity was 30 pg, and, with the addition of the mechanical vibrator, the effective mass was 3.1 ng. The optical mechanical coupling rate reached the GHz/nm level, providing guidance for the manufacturing and characterization of silicon-based zipper cavity accelerometers.
基于光子晶体微腔的腔光机械加速度计将机械谐振器与高品质因子光子晶体腔相结合。机械振子在机械共振模式下对微弱力/位移敏感，可实现极低噪声水平，理论上可达标准量子噪声极限。它是高精度加速度计的一个重要发展方向。本文分析了拉链型光子晶体腔光机械加速度计的原理和结构特点，设计了一种应用于加速度计的硅基拉链型光子晶体腔和机械振子结构。详细分析了拉链腔结构参数对光学品质因数的影响。通过调整结构参数将光腔的共振频率控制在195太赫兹左右，并分析了机械振子和光腔的机械共振特性。光腔的有效质量为30皮克，加上机械振子后有效质量为3.1纳克。光机械耦合率达到吉赫兹/纳米水平，为硅基拉链腔加速度计的制造和特性表征提供了指导。
