Liu Wen, Zhao Tianlong, He Zhiyuan, Ye Jingze, Gong Shaotong, Wang Xianglong, Yang Yintang
School of Microelectronics, Xidian University, Xi'an 710071, China.
State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China.
Micromachines (Basel). 2023 Sep 30;14(10):1891. doi: 10.3390/mi14101891.
In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconvenience and inaccuracy of the traditional design method, an orthogonal design and the particle swarm optimization (PSO) algorithm are introduced to improve the design efficiency. The whole process includes a finite element method (FEM) simulation, high-efficiency design, and verification. Through the theoretical analysis, the working mechanism of capacitive MEMS accelerometer is clear. Based on the comparison among the sweep calculation results of these parameters in the FEM software, four representative structural parameters are selected for further study, and they are , , and , respectively. and are the length of the sensing electrode and fixed electrode on the right. is the number of electrode pairs, and is the width of the mass block. Then, in order to reduce computation, an orthogonal design is adopted and finally, 81 experimental groups are produced. Sensitivity and mass are defined as evaluation parameters, and structural parameters of experimental groups are imported into the FEM software to obtain the corresponding calculation results. These simulation data are imported into neural networks with the PSO algorithm. For a comprehensively accurate examination, three cases are used to verify our design method, and every case endows the performance parameters with different weights and expected values. The corresponding structural parameters of each case are given out after 24 iterations. Finally, the maximum calculation errors of and are 1.2941% and 0.1335%, respectively, proving the feasibility of the high-efficiency design method.
本研究提出了一种电容式微机电系统（MEMS）加速度计的高效设计方法。由于MEMS加速度计具有高精度和紧凑的结构，已经开展了大量研究，主要集中在结构设计和材料选择方面。为了克服传统设计方法的不便和不准确之处，引入了正交设计和粒子群优化（PSO）算法来提高设计效率。整个过程包括有限元方法（FEM）模拟、高效设计和验证。通过理论分析，电容式MEMS加速度计的工作机制清晰明了。基于有限元软件中这些参数扫描计算结果的比较，选择了四个代表性结构参数进行进一步研究，它们分别是 、 、 和 。 和 分别是右侧传感电极和固定电极的长度。 是电极对数， 是质量块的宽度。然后，为了减少计算量，采用了正交设计，最终产生了81个实验组。将灵敏度 和质量 定义为评估参数，并将实验组的结构参数导入有限元软件以获得相应的计算结果。这些模拟数据与PSO算法一起导入神经网络。为了进行全面准确的检验，使用了三种情况来验证我们的设计方法，每种情况都赋予性能参数不同的权重和期望值。经过24次迭代后给出每种情况的相应结构参数。最后， 和 的最大计算误差分别为1.2941%和0.1335%，证明了高效设计方法的可行性。
