Qian Yicong, Shuai Yao, Wu Chuangui, Luo Wenbo, Pan Xinqiang, Zhang Wanli
Chongqing Institute of Microelectronics Industry Technology, University of Electronic Science and Technology of China, Chongqing 401332, China.
School of Electronic Science and Engineering, University of Electronic Science and Technology of China, Chengdu 611731, China.
Micromachines (Basel). 2023 Oct 14;14(10):1929. doi: 10.3390/mi14101929.
This paper studied the impact of the microstructure of interdigital electrodes on the performance of surface acoustic wave (SAW) resonators and proposed an innovative piston, dummy finger and tilt (PDT) structure, which was then applied to the GLONASS L3 band filters. Through the adoption of 3D finite element simulation (FEM), photolithography, and testing on an incredible high-performance surface acoustic wave (I.H.P. SAW) substrate, it is concluded that the total aperture length is 20 ( is period), resulting in a more optimal resonator performance; changing the width and length of the piston can suppress transverse modes spurious, but it does not enhance impedance ratio; to further improve the quality of the SAW resonator, the proposed PDT structure has been experimentally proven to not only effectively suppress transverse modes spurious but also possess a high impedance ratio. By utilizing a PDT structure within a "T + π" topology circuit, we successfully designed and manufactured a GLONASS L3 band filter with a bandwidth of 8 MHz and an insertion loss of 3.73 dB. The design of these resonators and filters can be applied to the construction of SAW filters in similar frequency bands such as BeiDou B2 band or GPS L2/L5 band.
本文研究了叉指电极的微观结构对表面声波（SAW）谐振器性能的影响，并提出了一种创新的活塞、虚设指和倾斜（PDT）结构，该结构随后被应用于格洛纳斯L3波段滤波器。通过采用三维有限元模拟（FEM）、光刻技术，并在一种超高性能表面声波（I.H.P. SAW）衬底上进行测试，得出总孔径长度为20（为周期）时，谐振器性能更优；改变活塞的宽度和长度可抑制横向模式杂散，但不会提高阻抗比；为进一步提高SAW谐振器的品质，所提出的PDT结构经实验证明不仅能有效抑制横向模式杂散，还具有高阻抗比。通过在“T + π”拓扑电路中采用PDT结构，我们成功设计并制造出了一款带宽为8 MHz、插入损耗为3.73 dB的格洛纳斯L3波段滤波器。这些谐振器和滤波器的设计可应用于北斗B2波段或GPS L2/L5波段等类似频段的SAW滤波器构建。
