Qin Zhen-Hui, Wu Shu-Mao, Wang Yong, Liu Kang-Fu, Wu Tao, Yu Si-Yuan, Chen Yan-Feng
National Laboratory of Solid State Microstructures, Department of Materials Science and Engineering, Nanjing University, Nanjing 210093, China.
State Key Lab of Crystal Materials, Shandong University, Jinan 250100, China.
Micromachines (Basel). 2021 Aug 29;12(9):1039. doi: 10.3390/mi12091039.
This paper proposed a solid-mounted (SM) longitudinally excited shear wave resonator (i.e., YBAR). By adopting a 200 nm x-cut LiNbO film, top (aluminum) and bottom (platinum) electrodes in 50 nm thickness and 500 nm width, this resonator simultaneously achieves an operating frequency over 5 GHz with an electromechanical coupling coefficient exceeding 50%. Compared with previously proposed YBAR with suspended structure, the proposed SM-YBAR can effectively suppress unwanted spurious modes with only a slight loss of the electromechanical coupling coefficient. The SM-YABR also provides better device stability, possible low-temperature drift coefficient, and a more convenient and mature device processing. It has the potential to meet the multiple requirements for the next generation signal processing devices in terms of high frequency, large bandwidth, stability, and low cost, etc.
本文提出了一种固支（SM）纵向激励剪切波谐振器（即YBAR）。通过采用200nm的X切LiNbO薄膜、厚度为50nm且宽度为500nm的顶部（铝）和底部（铂）电极，该谐振器同时实现了超过5GHz的工作频率以及超过50%的机电耦合系数。与先前提出的具有悬浮结构的YBAR相比，所提出的SM - YBAR能够有效抑制不需要的杂散模式，且机电耦合系数仅有轻微损失。SM - YABR还具有更好的器件稳定性、可能的低温漂移系数以及更便捷和成熟的器件加工工艺。它有潜力满足下一代信号处理设备在高频、大带宽、稳定性和低成本等方面的多种要求。
