Liu Yulong, Wang Hongliang, Zhang Feng, Gou Luhao, Zhang Shengkuo, Cao Gang, Zhang Pengcheng
National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.
Sensors (Basel). 2023 Dec 18;23(24):9895. doi: 10.3390/s23249895.
Surface acoustic wave resonators are widely applied in electronics, communication, and other engineering fields. However, the spurious modes generally present in resonators can cause deterioration in device performance. Therefore, this paper proposes a hexagonal weighted structure to suppress them. With the construction of a finite element resonator model, the parameters of the interdigital transducer (IDT) and the area of the dummy finger weighting are determined. The spurious waves are confined within the dummy finger area, whereas the main mode is less affected by this structure. To verify the suppression effect of the simulation, resonators with conventional and hexagonal weighted structures are fabricated using the micro-electromechanical systems (MEMS) process. After the S-parameter test of the prepared resonators, the hexagonal weighted resonators achieve a high level of spurious mode suppression. Their properties are superior to those of the conventional structure, with a higher Q value (10,406), a higher minimum return loss (25.7 dB), and a lower ratio of peak sidelobe (19%). This work provides a feasible solution for the design of SAW resonators to suppress spurious modes.
表面声波谐振器广泛应用于电子、通信和其他工程领域。然而，谐振器中通常存在的杂散模式会导致器件性能下降。因此，本文提出一种六边形加权结构来抑制它们。通过构建有限元谐振器模型，确定了叉指换能器（IDT）的参数和虚拟指加权的面积。杂散波被限制在虚拟指区域内，而主模式受该结构的影响较小。为了验证模拟的抑制效果，采用微机电系统（MEMS）工艺制造了具有传统结构和六边形加权结构的谐振器。在对制备的谐振器进行S参数测试后，六边形加权谐振器实现了高水平的杂散模式抑制。它们的性能优于传统结构，具有更高的品质因数（10406）、更高的最小回波损耗（25.7 dB）和更低的峰值旁瓣比（19%）。这项工作为设计用于抑制杂散模式的声表面波谐振器提供了一种可行的解决方案。
