Shan Shuonan, Li Jingwen, Liu Peiyuan, Li Qiaolin, Wang Xiaohao, Li Xinghui
Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.
Tsinghua-Berkeley Shenzhen Institute, Tsinghua University, Shenzhen 518055, China.
Sensors (Basel). 2023 Oct 11;23(20):8381. doi: 10.3390/s23208381.
Most existing multi-channel spectrometers are constructed by physically stacking single-channel spectrometers, resulting in their large size, high weight, and limited number of channels. Therefore, their miniaturization is urgently needed. In this paper, a microlens array grating is designed for miniature multi-channel spectrometers. A transmissive element integrating microlens arrays and gratings, the MLAG, enables simultaneous focusing and dispersion. Using soft lithography, the MLAG was fabricated with a deviation of less than 2.2%. The dimensions are 10 mm × 10 mm × 4 mm with over 2000 available units. The MLAG spectrometer operates in the 400-700 nm wavelength range with a resolution of 6 nm. Additionally, the designed MLAG multi-channel spectrometer is experimentally verified to have independently valid cells that can be used in multichannel spectrometers. The wavelength position repeatability deviation of each cell is about 0.5 nm, and the repeatability of displacement measurements by the chromatic confocal sensor with the designed MLAG multi-channel spectrometer is less than 0.5 μm.
大多数现有的多通道光谱仪是通过物理堆叠单通道光谱仪构建而成的，这导致它们体积庞大、重量较重且通道数量有限。因此，迫切需要对其进行小型化。本文为微型多通道光谱仪设计了一种微透镜阵列光栅。一种集成了微透镜阵列和光栅的透射元件，即微透镜阵列光栅（MLAG），能够实现同时聚焦和色散。利用软光刻技术制造的MLAG，偏差小于2.2%。其尺寸为10毫米×10毫米×4毫米，有超过2000个可用单元。MLAG光谱仪在400 - 700纳米波长范围内工作，分辨率为6纳米。此外，经实验验证，所设计的MLAG多通道光谱仪具有可独立有效的单元，可用于多通道光谱仪。每个单元的波长位置重复性偏差约为0.5纳米，并且使用所设计的MLAG多通道光谱仪的色散共焦传感器进行位移测量的重复性小于0.5微米。
