Lu Jie, Zheng Miaomiao, Liu Jinxin, Zhang Yufeng, Zhang Xueao, Cai Weiwei
College of Physical Science and Technology, Xiamen University, Xiamen 361005, China.
Jiujiang Research Institute, Xiamen University, Jiujiang 360404, China.
Nanomaterials (Basel). 2023 Nov 30;13(23):3056. doi: 10.3390/nano13233056.
Although the synthesis of molybdenum disulfide (MoS) on sapphire has made a lot of progress, how the substrate surface affects the growth still needs to be further studied. Herein, the impact of the sapphire step height on the growth of monolayer MoS through chemical vapor deposition (CVD) is studied. The results show that MoS exhibits a highly oriented triangular grain on a low-step (0.44-1.54 nm) substrate but nanoribbons with a consistent orientation on a high-step (1.98-3.30 nm) substrate. Triangular grains exhibit cross-step growth, with one edge parallel to the step edge, while nanoribbons do not cross steps and possess the same orientation as the step. Scanning electron microscopy (SEM) reveals that nanoribbons are formed by splicing multiple grains, and the consistency of the orientation of these grains is demonstrated with a transmission electron microscope (TEM) and second-harmonic generation (SHG). Furthermore, our CP2K calculations, conducted using the generalized gradient approximation and the Perdew-Burke-Ernzerhof (PBE) functional with D3 (BJ) correction, show that MoS domains prefer to nucleate at higher steps, while climbing across a higher step is more difficult. This work not only sheds light on the growth mechanism of monolayer MoS but also promotes its applications in electrical, optical, and energy-related devices.
尽管在蓝宝石上合成二硫化钼(MoS)已取得了很大进展,但衬底表面如何影响其生长仍有待进一步研究。在此,研究了蓝宝石台阶高度对通过化学气相沉积(CVD)生长单层MoS的影响。结果表明,MoS在低台阶(0.44 - 1.54纳米)衬底上呈现高度取向的三角形晶粒,而在高台阶(1.98 - 3.30纳米)衬底上则呈现取向一致的纳米带。三角形晶粒呈现跨台阶生长,其中一条边与台阶边缘平行,而纳米带不跨台阶且与台阶具有相同的取向。扫描电子显微镜(SEM)显示纳米带是由多个晶粒拼接而成,并且通过透射电子显微镜(TEM)和二次谐波产生(SHG)证明了这些晶粒取向的一致性。此外,我们使用广义梯度近似以及带有D3(BJ)校正的Perdew - Burke - Ernzerhof(PBE)泛函进行的CP2K计算表明,MoS畴更倾向于在较高台阶处成核,而跨越较高台阶则更困难。这项工作不仅揭示了单层MoS的生长机制,还促进了其在电气、光学和能源相关器件中的应用。