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金属和合金的二次离子质谱成像

Secondary Ion Mass Spectral Imaging of Metals and Alloys.

作者信息

Shen Yanjie, Howard Logan, Yu Xiao-Ying

机构信息

College of Biology and Oceanography, Weifang University, 5147 Dongfeng East Street, Weifang 261061, China.

Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37830, USA.

出版信息

Materials (Basel). 2024 Jan 22;17(2):528. doi: 10.3390/ma17020528.

Abstract

Secondary Ion Mass Spectrometry (SIMS) is an outstanding technique for Mass Spectral Imaging (MSI) due to its notable advantages, including high sensitivity, selectivity, and high dynamic range. As a result, SIMS has been employed across many domains of science. In this review, we provide an in-depth overview of the fundamental principles underlying SIMS, followed by an account of the recent development of SIMS instruments. The review encompasses various applications of specific SIMS instruments, notably static SIMS with time-of-flight SIMS (ToF-SIMS) as a widely used platform and dynamic SIMS with Nano SIMS and large geometry SIMS as successful instruments. We particularly focus on SIMS utility in microanalysis and imaging of metals and alloys as materials of interest. Additionally, we discuss the challenges in big SIMS data analysis and give examples of machine leaning (ML) and Artificial Intelligence (AI) for effective MSI data analysis. Finally, we recommend the outlook of SIMS development. It is anticipated that in situ and operando SIMS has the potential to significantly enhance the investigation of metals and alloys by enabling real-time examinations of material surfaces and interfaces during dynamic transformations.

摘要

二次离子质谱(SIMS)因其显著优势,包括高灵敏度、高选择性和高动态范围,成为质谱成像(MSI)的一项杰出技术。因此,SIMS已在许多科学领域得到应用。在本综述中,我们深入概述了SIMS的基本原理,随后介绍了SIMS仪器的最新发展。该综述涵盖了特定SIMS仪器的各种应用,特别是以飞行时间二次离子质谱(ToF-SIMS)作为广泛使用平台的静态SIMS,以及以纳米二次离子质谱(Nano SIMS)和大几何尺寸二次离子质谱作为成功仪器的动态SIMS。我们特别关注SIMS在作为感兴趣材料的金属和合金的微分析和成像方面的效用。此外,我们讨论了大型SIMS数据分析中的挑战,并给出了用于有效MSI数据分析的机器学习(ML)和人工智能(AI)的示例。最后,我们展望了SIMS的发展前景。预计原位和实时操作的SIMS通过在动态转变过程中对材料表面和界面进行实时检查,有可能显著加强对金属和合金的研究。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/2e11/10820874/7b8b1e9190c9/materials-17-00528-g001.jpg

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