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具有大光学孔径的水浸式微机电系统镜子

Water-Immersible MEMS Mirror with a Large Optical Aperture.

作者信息

Yang Yi, Liu Yichen, Su Yongquan, Wang Yang, Zhang Yonggui, Chen Hao, Wang Lihao, Wu Zhenyu

机构信息

School of Microelectronics, Shanghai University, Shanghai 200444, China.

Shanghai Industrial Technology Research Institute, Shanghai 201800, China.

出版信息

Micromachines (Basel). 2024 Feb 2;15(2):235. doi: 10.3390/mi15020235.

DOI:10.3390/mi15020235
PMID:38398964
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC10892426/
Abstract

This paper presents a two-axis AlScN-based water-immersible MEMS mirror fabricated in an 8-inch MEMS process. Compared with other studies, this device has a larger optical aperture 10 mm in diameter. The resonant frequencies of the device are 1011 Hz in air and 342 Hz in water. The scanning angle reaches ±5° and ±2° at resonant frequencies in air and water, respectively. The cavitation phenomenon is observed when the device is operating in water, which leads the device to electrical failure. To address this issue, a device with reduced resonant frequencies-246 Hz and 152 Hz in air and water-is characterized, through which the bubbles can be effectively prohibited. This MEMS mirror could potentially be used in ultrasound and photoacoustic microscopy applications.

摘要

本文介绍了一种采用8英寸MEMS工艺制造的基于AlScN的双轴水浸式MEMS微镜。与其他研究相比，该器件具有更大的光学孔径，直径为10毫米。该器件在空气中的共振频率为1011赫兹，在水中为342赫兹。在空气中和水中的共振频率下，扫描角度分别达到±5°和±2°。当该器件在水中运行时会观察到空化现象，这会导致器件电气故障。为了解决这个问题，对一种在空气中和水中共振频率降低至246赫兹和152赫兹的器件进行了表征，通过该器件可以有效防止气泡产生。这种MEMS微镜有可能用于超声和光声显微镜应用。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/3a759b16382a/micromachines-15-00235-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/2cbb7e887ea9/micromachines-15-00235-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/75e046e6529b/micromachines-15-00235-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/cc72ed12ef32/micromachines-15-00235-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/1c326af6e798/micromachines-15-00235-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/7f0c7e31a46c/micromachines-15-00235-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/cc022d62193c/micromachines-15-00235-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/92a3ce5c0dc4/micromachines-15-00235-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/78c3c0548253/micromachines-15-00235-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/373359bf3950/micromachines-15-00235-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/480e85eb3912/micromachines-15-00235-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/3a759b16382a/micromachines-15-00235-g011.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/2cbb7e887ea9/micromachines-15-00235-g001.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/75e046e6529b/micromachines-15-00235-g002.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/cc72ed12ef32/micromachines-15-00235-g003.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/1c326af6e798/micromachines-15-00235-g004.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/7f0c7e31a46c/micromachines-15-00235-g005.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/cc022d62193c/micromachines-15-00235-g006.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/92a3ce5c0dc4/micromachines-15-00235-g007.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/78c3c0548253/micromachines-15-00235-g008.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/373359bf3950/micromachines-15-00235-g009.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/480e85eb3912/micromachines-15-00235-g010.jpg
https://cdn.ncbi.nlm.nih.gov/pmc/blobs/cefd/10892426/3a759b16382a/micromachines-15-00235-g011.jpg

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本文引用的文献

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A water-immersible scanning mirror with hybrid polymer and elastomer hinges for high-speed and wide-field 3D ultrasound imaging.一种带有混合聚合物和弹性体铰链的水浸式扫描镜，用于高速和宽视野三维超声成像。
Sens Actuators A Phys. 2024 Mar 1;367. doi: 10.1016/j.sna.2024.115032. Epub 2024 Jan 23.
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Resolution adjustable Lissajous scanning with piezoelectric MEMS mirrors.基于压电 MEMS 反射镜的分辨率可调利斯泽斯基扫描
Opt Express. 2023 Jan 16;31(2):2846-2859. doi: 10.1364/OE.476198.
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AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application.
用于激光雷达应用的具有大视野的AlScN压电微机电系统镜子
Micromachines (Basel). 2022 Sep 18;13(9):1550. doi: 10.3390/mi13091550.
4
Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients and of AlN and AlScN Thin Films.用于同时测定AlN和AlScN薄膜压电系数的过程控制监测器（PCM）
Micromachines (Basel). 2022 Apr 7;13(4):581. doi: 10.3390/mi13040581.
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A water-immersible 2-axis scanning mirror microsystem for ultrasound andha photoacoustic microscopic imaging applications.一种用于超声和光声显微成像应用的可水浸式双轴扫描镜微系统。
Microsyst Technol. 2013;19(4):577-582. doi: 10.1007/s00542-012-1660-4. Epub 2012 Sep 13.
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2D Scanning Micromirror with Large Scan Angle and Monolithically Integrated Angle Sensors Based on Piezoelectric Thin Film Aluminum Nitride.基于压电薄膜氮化铝的具有大扫描角度和单片集成角度传感器的二维扫描微镜
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Micromachines (Basel). 2018 Nov 8;9(11):584. doi: 10.3390/mi9110584.
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Opt Lett. 2018 Mar 1;43(5):987-990. doi: 10.1364/OL.43.000987.
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A PDMS-Based 2-Axis Waterproof Scanner for Photoacoustic Microscopy.一种用于光声显微镜的基于聚二甲基硅氧烷的两轴防水扫描仪。
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