Song Longfei, Cardoletti Juliette, Martínez Alfredo Blázquez, Benčan Andreja, Kmet Brigita, Girod Stéphanie, Defay Emmanuel, Glinšek Sebastjan
Materials Research and Technology Department, Luxembourg Institute of Science and Technology, 41 rue du Brill, L-4422, Belvaux, Luxembourg.
University of Luxembourg, 41 rue du Brill, L-4422, Belvaux, Luxembourg.
Nat Commun. 2024 Feb 29;15(1):1890. doi: 10.1038/s41467-024-46257-0.
Integration of thin-film oxide piezoelectrics on glass is imperative for the next generation of transparent electronics to attain sensing and actuating functions. However, their crystallization temperature (above 650 °C) is incompatible with most glasses. We developed a flash lamp process for the growth of piezoelectric lead zirconate titanate films. The process enables crystallization on various types of glasses in a few seconds only. The functional properties of these films are comparable to the films processed with standard rapid thermal annealing at 700 °C. A surface haptic device was fabricated with a 1 μm-thick film (piezoelectric e of -5 C m). Its ultrasonic surface deflection reached 1.5 μm at 60 V, sufficient for its use in surface rendering applications. This flash lamp annealing process is compatible with large glass sheets and roll-to-roll processing and has the potential to significantly expand the applications of piezoelectric devices on glass.
将薄膜氧化物压电材料集成到玻璃上对于下一代透明电子产品实现传感和驱动功能至关重要。然而，它们的结晶温度（高于650°C）与大多数玻璃不兼容。我们开发了一种用于生长压电锆钛酸铅薄膜的闪光灯工艺。该工艺仅需几秒钟就能在各种类型的玻璃上实现结晶。这些薄膜的功能特性与在700°C下进行标准快速热退火处理的薄膜相当。用1μm厚的薄膜（压电系数e为-5 C/m）制作了一个表面触觉装置。在60V时其超声表面挠度达到1.5μm，足以用于表面渲染应用。这种闪光灯退火工艺与大型玻璃板和卷对卷加工兼容，并且有潜力显著扩展压电器件在玻璃上的应用。
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