Ullberg Nathan, Filoramo Arianna, Campidelli Stéphane, Derycke Vincent
Université Paris-Saclay, CEA, CNRS, NIMBE, LICSEN, 91191 Gif-sur-Yvette, France.
ACS Nano. 2024 Apr 9;18(14):9886-9894. doi: 10.1021/acsnano.3c09337. Epub 2024 Mar 28.
Monolayers of transition metal dichalcogenides (2D TMDs) experience strong modulation of their optical properties when the charge density is varied. Indeed, the transition from carriers composed mostly of excitons at low electron density to a situation in which trions dominate at high density is accompanied by a significant evolution of both the refractive index and the extinction coefficient. Using optical interference reflection microscopy at the excitonic wavelength, this (, κ)- relationship can be exploited to directly image the electron density in operating TMD devices. In this work, we show how this technique, which we call XRM (excitonic reflection microscopy), can be used to study charge distribution in MoS field-effect transistors with subsecond throughput, in wide-field mode. Complete maps of the charge distribution in the transistor channel at any drain and gate bias polarization point (, ) are obtained, at ∼3 orders of magnitude faster than with scanning probe techniques such as KPFM. We notably show how the advantages of XRM enable real-time mapping of bias-dependent charge inhomogeneities, the study of resistive delays in 2D polycrystalline networks, and the evaluation of the vs competition to control the charge distribution in active devices.
当电荷密度发生变化时,过渡金属二硫属化物(2D TMDs)的单层会经历其光学性质的强烈调制。实际上,从低电子密度下主要由激子组成的载流子到高密度下三重子占主导的情况的转变,伴随着折射率和消光系数的显著演变。利用激子波长处的光学干涉反射显微镜,可以利用这种(n, κ)关系直接成像工作中的TMD器件中的电子密度。在这项工作中,我们展示了这种我们称为XRM(激子反射显微镜)的技术如何能够以亚秒级的通量在宽场模式下用于研究MoS场效应晶体管中的电荷分布。获得了在任何漏极和栅极偏置极化点(Vds, Vgs)处晶体管沟道中电荷分布的完整映射,速度比诸如KPFM的扫描探针技术快约3个数量级。我们特别展示了XRM的优势如何实现对偏置相关电荷不均匀性的实时映射、对二维多晶网络中电阻延迟的研究以及对n型与p型竞争以控制有源器件中电荷分布的评估。