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优化氟化钙结晶工艺处理高浓度含氟半导体工业废水。

Optimization of Calcium Fluoride Crystallization Process for Treatment of High-Concentration Fluoride-Containing Semiconductor Industry Wastewater.

机构信息

Department of Environmental Science & Biotechnology, Jeonju University, Jeonju 55069, Republic of Korea.

出版信息

Int J Mol Sci. 2024 Apr 2;25(7):3960. doi: 10.3390/ijms25073960.

DOI:10.3390/ijms25073960
PMID:38612770
原文链接:https://pmc.ncbi.nlm.nih.gov/articles/PMC11011877/
Abstract

This study utilized a fluidized bed reactor (FBR) for fluoride removal from high-concentration fluoride-ion-containing simulated semiconductor industry wastewater and recovered high-purity CaF crystals. The effects of hydraulic retention time (HRT), pH, Ca to F ratio, upflow velocity, seed size and seed bed height were investigated by performing lab-scale batch experiments. Considering fluoride removal and CaF crystallization efficiency, 5 h HRT, pH 6, seed height of 50 cm and [Ca]/[F] ratio of 0.55 (mol/mol) were found to be optimum. The effect of the interaction between the important process parameters on fluoride removal was further analyzed using response surface methodology (RSM) experimental design. The results showed that all the individual parameters have a significant impact ( = 0.0001) on fluoride removal. SEM-EDX and FTIR analysis showed the composition of the crystals formed inside FBR. HR-XRD analysis confirmed that the crystalline structure of samples was mainly CaF. The results clearly demonstrated the feasibility of silica seed material containing FBR for efficient removal and recovery of fluoride as high-purity calcium fluoride crystals.

摘要

本研究利用流化床反应器（FBR）从高浓度含氟离子的模拟半导体工业废水中去除氟，并回收高纯度的 CaF 晶体。通过进行实验室规模的批量实验，考察了水力停留时间（HRT）、pH 值、Ca/F 比、上升流速、种子大小和种子床高度的影响。考虑到氟化物去除和 CaF 结晶效率，发现 5 h 的 HRT、pH 值为 6、种子高度为 50 cm 和 [Ca]/[F] 比为 0.55（摩尔/摩尔）为最佳条件。使用响应面法（RSM）实验设计进一步分析了重要工艺参数之间的相互作用对氟化物去除的影响。结果表明，所有单个参数对氟化物去除均有显著影响（ = 0.0001）。SEM-EDX 和 FTIR 分析表明了 FBR 内形成的晶体的组成。高分辨率 X 射线衍射（HR-XRD）分析证实了样品的晶体结构主要为 CaF。结果清楚地表明，含有 FBR 的硅砂种子材料在高效去除和回收氟化物为高纯度氟化钙晶体方面具有可行性。

https://cdn.ncbi.nlm.nih.gov/pmc/blobs/875d/11011877/6ea6bc8a04dd/ijms-25-03960-g007.jpg
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